基于位置敏感器件的高精度激光位置检测系统  

High Precision Laser Position Detecting System Based on Position Sensitive Device

作　　者：程智[1] 董登峰[1] 周维虎[1] 刘鑫[1] 

机构地区：[1]中国科学院光电研究院光电工程部,北京100094

出　　处：《激光与光电子学进展》2016年第8期146-154,共9页Laser & Optoelectronics Progress

基　　金：国家重大科学仪器设备开发专项(2011YQ120022)

摘　　要：光电非接触式测量方法对实现微位移测量具有重要意义,位置敏感器件(PSD)是实现光斑位置探测的传感器件,其探测精度以及基于该器件的数据处理方法直接影响位置测量精度。依据PSD各电极输出的光电流大小反比于入射光位置到各电极之间距离的工作原理,设计了二维激光位置检测系统方案。为了提高PSD输出微弱电流信号的稳定性和位置探测精度,重点研究了信号调理电路设计、参数匹配、滤波方法与实时并行计算方法。实验结果表明:在±2mm方形区域内,基于PSD所设计的探测系统单点稳定性精度优于2μm,能够满足依托项目中激光跟踪仪对空间目标准确定位的要求以及基于激光位置检测的高精度实时微位移测量相关应用的需求。Non-contact photoelectric measuring method is important to realize micro-displacement measurement. Position sensitive device （PSD） is a kind of light spot position detecting sensor. Its detection accuracy and data processing method based on PSD can directly affect the location measurement accuracy. The working principle of PSD is that photocurrent intensity output from each electrode is inversely proportional to the distance between the position of the incident light and each electrode. According to this principle, the scheme of the two-dimensional laser position detecting, system has been designed. In order to improve the stability of the output weak current signals from PSD and the location detection accuracy, signal conditioning circuit design, parameters matching, filtering method and real-time parallel algorithm are mainly studied. The experiment results indicate that, within ± 2 mm square area, the stability accuracy of the single point of this detecting system based on PSD is better than 2 μm. Therefore, this system can satisfy the requirements of space target accurate positioning of the laser tracker in funded project and application requirements like real-time high accuracy micro-displacement measurement based on laser position detecting.

关 键 词：测量 激光位置检测 信号处理 位置敏感器件 位置精度 

分 类 号：TH741[机械工程—光学工程]