射频功率对氢气与反式二丁烯的低压电感耦合等离子体的影响（英文）  

Effects of RF power on low-pressure inductively*coupled plasma of hydrogen and trans-two-butane

作　　者：陈果[1] 何智兵[1] 何小珊[1] 张玲[1] 唐永建[1] 

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《强激光与粒子束》2016年第9期56-61,共6页High Power Laser and Particle Beams

摘　　要：利用等离子体聚合技术制备的GDP壳层是目前ICF靶丸的主要烧蚀层材料。为了了解GDP薄膜沉积过程中的CH等离子体的状态,采用朗缪尔探针和质谱仪对C4H8/H2等离子体的组分和状态参数进行了诊断,并对等离子体的电子能量分布函数、电子密度、电子温度等进行了深入分析。同时讨论了等离子体状态与放电参数之间的关系。研究发现,射频功率对等离子体参数有明显的影响。从10W到35W,电子密度正比于射频功率。随着射频功率的增加,在两步电离机制作用下,电子温度和等离子体电势呈现先减小后增大的变化趋势。另外,在高气压下,质谱诊断中发现了大量的稳定的小质量碎片离子,这表明在高气压下等离子体气相中的离子碎片聚合反应被抑制。The hydrocarbon glow discharge polymer （GDP）shells fabricated by plasma polymerization technology were used as the ablators for ICF targets.In order to understand the properties of hydrocarbon plas-ma for GDP deposition,plasmas of trans-two-butane and H 2 （T2 B/H 2 ）were investigated by Langmuir probe and mass spectrometer in the diffusion region.Several parameters,such as electron energy probability func-tions,electron densities,electron temperature were analyzed.The relationship between the properties of plasma and the discharge parameters were also discussed.It was found that there was a significant modulating effect of the radio frequency （RF）powers on the plasma parameters.The electron density was found to be nearly pro-portional to the discharge power in the range of 10 W to 35 W.As the RF power increased,the electron tem-perature and plasma potential decreased at first then increased with discharge power,which was governed by a two-step ionization mechanism.The small and stable fragments,found by mass spectrometer,indicated that the polymerization was suppressed in the gas phase at high RF power.

关 键 词：GDP薄膜 朗缪尔探针 质谱仪 等离子体诊断 

分 类 号：O539[理学—等离子体物理]