高灵敏度硅酸镓镧声表面波压力传感器研究  

Research on High Sensitivity Surface Acoustic Wave Pressure Sensor Based on Langasite

作　　者：陈高丁 李红浪[2] 柯亚兵[2] 朱波[3] 陈淑芬[1] 何世堂[2] 

机构地区：[1]北京理工大学光电学院,北京100081 [2]中国科学院声学研究所,北京100190 [3]燕山大学电气工程学院,河北秦皇岛066004

出　　处：《压电与声光》2016年第4期519-522,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(11174318;11304346);国家高技术研究发展计划("八六三"计划)基金资助项目(SS2013AA041103);北京市科技计划课题基金资助项目(Z141100003814016)

摘　　要：为提高硅酸镓镧（LGS）声表面波（SAW）压力传感器的灵敏度,研究了一种采用点压式压力传递结构的SAW压力传感器。理论上采用压电微扰理论和有限元法结合,使用有限元法获得压力作用下LGS基片的应力、应变,并将该应力、应变量代入叠加偏载的电弹方程和一阶微扰方程,求得传感器的压力灵敏度。计算表明0-0.4 MPa压力范围内其归一化压力灵敏度为0.065×10^-6/psi,与空腔结构LGS SAW压力传感器相比,该结构的灵敏度提高了约9倍。基于上述分析结构,制作了一种基于LGS（0°,138.5°,26.7°）的点压式压力传递结构的SAW传感器,实验结果和理论分析吻合。In order to improve the sensitivity of surface acoustic wave（SAW） pressure sensor based on langasite（LGS）, a SAW sensor of point pressure forced package structure is studied. The finite element method（FEM） and the perturbation method is theoretically adopted. The stress and strain of LGS substrate induced by pressure are calculated by FEM, and the pressure sensitivity is obtained by substituting the stress and strain into linear electro-elastic equations and first order pertur- bation equation. The calculated normalized pressure sensitivity is 0. 067 × 10^-6/psi within 0-0.4 MPa, and about 9 times higher than the reported SAW LGS pressure sensor of the cavity structure. A SAW sensor based on LGS （0°, 138.5°, 26.7°） is designed, and experimental result matches the theoretical analysis.

关 键 词：声表面波(SAW) 压力传感器 硅酸镓镧(LGS) 点压力式 

分 类 号：TN65[电子电信—电路与系统]