基于声表面波微通道内微液滴选择性输运研究  

Selective Transportation of a Droplet in Microchannels Based on Surface Acoustic Wave

作　　者：王保成[1] 付相庭[2] 章安良[3] 

机构地区：[1]襄阳职业技术学院电子信息工程学院,湖北襄阳441021 [2]宁波大学微纳电子系统研究所,浙江宁波315211 [3]常州工学院电气与光电工程学院,江苏常州213022

出　　处：《压电与声光》2016年第4期639-642,共4页Piezoelectrics & Acoustooptics

基　　金：常州工学院科研基金资助项目(YN1404);常州工学院大学生创新基金资助项目(J140029);浙江省重点学科基金资助项目(Xkl11077)

摘　　要：提出了声表面波实现微通道内微液滴选择性输运的方法,并研制了相应的微器件。它包括128°YXLiNbO3基片上光刻有两叉指换能器的压电子器件、微隔板和聚二甲基硅氧烷微通道。通过软光刻工艺制作聚二甲基硅氧烷微通道,采用内嵌塑料薄片微隔板,将微通道分割为两分支微通道,并贴合于压电基片上。叉指换能器激发的声表面波结合进样器进样的石蜡油驱使待输运微液滴向目标分支微通道运动,实现微通道内微液滴选择性地输运到目标分支微通道。以水液滴为研究对象,进行了微液滴选择性输运实验,结果表明,声表面波可以实现微通道内微液滴选择性输运到目标分支微通道,从而为压电微流器件进行微流分析提供前提条件。A method for selectively transporting a droplet in microchannels using surface acoustic wave was pres- ented and a microdevice for selectively transporting the droplet was fabricated. The microdevice was comprised of a piezoelectric sub-device with two interdigital transducers on 128°YX-LiNbO3 substrate, a micro-clapboard and a poly （dimethylsiloxane） （PDMS） microchannel. The PDMS microchannel was fabricated by soft lithographic technology, and was divided into two sub-microchannels by the plastic micro-clapboard embedded into the microchannel. The PDMS microchannel was mounted onto the piezoelectric substrate. Together with paraffin oil in a microsyringe, sur- face acoustic wave, which was excited by the interdigital transducers, selectively transported the droplet to a target sub-microchannel. Transporting experiments of a Water droplet with red color were done. Results show that the droplet in the microchannel can be successfully transported to the target sub-microchannel. The work is help for mi- crofluidic analysis on a piezoelectric microfluidic device.

关 键 词：压电基片 选择性输运 声表面波 微液滴 微通道 

分 类 号：TN371[电子电信—物理电子学]