超精密飞切加工表面微波纹分析研究  

Study of the Surface-waviness in Ultra-precision Flycutting Machining

作　　者：张剑锋[1] 苏文虎[1] 张利平[1] 

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《机械工程师》2016年第8期271-273,共3页Mechanical Engineer

摘　　要：超精密飞切加工技术被广泛应用于大口径软脆性平面光学元件的加工,并获得了优质的最终表面,但是加工后检测发现其最终表面微观形貌存在沿切削方向的波纹,这些微波纹对于元件的光学性能有不利影响。通过对机床主轴系统进行仿真分析,发现与条纹频率接近的模态,进而改变飞切机床主轴的结构,研究了刀盘结构对飞切加工表面微波纹的影响。并采用小波分解对表面特征进行提取验证。结果表明:主轴结构对表面微波纹的产生有重要影响,改变主轴结构后加工表面微波纹的形成受到大幅抑制,平面光学元件的微观表面质量得到提高。Ultra-precision flycutting is widely used to achieve good process of plane optical materials with soft and brittleproperties. However, undesirable waviness is also appeared on the machined surface which has adverse effects on theperformance of the optical materials. The spindle system plays an important role in the flycuting machine, and its vibrationdirectly affects the generation of the waviness. The waviness is studied by changing the structure of the spindle system andtesting the feature of the machined optical materials. In addition, finite element analysis is used to get the vibration of thesidle system. Wavelet decomposition is used to detect the waviness feature. Results show that the frequency of spindlesystem is consistent with the frequency of the waviness and waviness is almost removed after changing the structure ofspindle system.

关 键 词：超精密飞切 主轴系统 表面微波纹 有限元仿真 

分 类 号：TG506[金属学及工艺—金属切削加工及机床]