折反射式零位补偿检验  

Catadioptric Null Compensating Test

作　　者：张珑[1] 胡文琦[1] 郑列华[1] 郝沛明[2] 

机构地区：[1]中国科学院上海技术物理研究所,上海200083 [2]同济大学,上海200092

出　　处：《光子学报》2016年第7期7-11,共5页Acta Photonica Sinica

基　　金：国家重点基础研究发展计划(No.2011CB013206)资助~~

摘　　要：结合奥夫纳尔折射式零位补偿器和马克苏托夫反射式零位补偿器的优点,对大口径、大相对孔径凹非球面加工检验提出一种折反射式零位补偿检验法.该方法采用放置在非球面顶点曲率中心之前的两块透镜和一块反射镜来实现大口径凹非球面零位补偿检验.依据三级像差理论,推导了初始结构计算公式;通过对口径为1 000mm、顶点曲率半径为4 000mm、偏心率为1.05、中心孔为200mm的凹非球面进行补偿器设计,完成了原理验证,优化后系统剩余波像差峰谷值为0.004 2λ.研究结果表明该方法轴向光路长度短,补偿能力强,可用于允许部分中心遮拦的大口径、大相对孔径凹非球面检验.By combining the advantages of Offner refractive compensator and Maksutov reflective compensator, aiming at the testing of concave aspheric surface with large aperture or large relative aperture, a novel null compensator named catadioptric compensator was proposed.This method uses double lens and single mirror to test concave aspheric surface, the compensator is set between the mirror under test and its curvature center. Based on third-order aberration theory, the calculating formulas of initial structure were derivated. By compensator design for a concave aspheric suface, the princple of the proposed method was verified. The aperture of the asperic surace is 1 000 mm, the vertex radius of curvature of the aspherical surface is 4 000 mm, the conicoid coefficien is 1.05, the inner hole diameter is 200 mm, the peak valley value of the residual wavefront error of the optimized system is 0.004 2λ. The result shows that the axial testing size of this compensator is short and the compensating ablility is strong. If central obscuration is allowed, it is available to test concave aspheric surface with large aperture or large relative aperture.

关 键 词：光学设计 折反射式补偿器 三级像差理论 非球面 补偿检验 大口径 大相对孔径 

分 类 号：TN247[电子电信—物理电子学] O435.2[机械工程—光学工程]