一种用于超光谱成像系统中消高级次光谱集成滤光片的设计与研制  

Design and fabrication of an integrated order blocking filter for hyperspectral imaging system

作　　者：段微波[1] 李大琪[1] 余德明[1] 刘保剑 刘定权[1] 

机构地区：[1]中国科学院上海技术物理研究所,上海200083

出　　处：《红外与毫米波学报》2016年第4期430-434,441,共6页Journal of Infrared and Millimeter Waves

基　　金：中国科学院青年创新促进会人才培养计划(2013160)~~

摘　　要：介绍了一种用于工作波段0.4-2.5μm超光谱成像系统中消高级次光谱集成滤光片的设计与研制.针对offner凸面光栅分光的工作特点,通过在同一光学基片上划分三块不同的几何区域,分波段实现超光谱成像仪全光谱范围内因光栅分光引起高级次光谱的抑制与消除,同时保证工作波段的光学效率优于93%.采用精细掩模技术,保证不同波段之间过渡区域的尺寸小于30μm,有效提高光谱利用效率.An integrated order blocking filter covering the wavelength range from 0.4 μm to 2.5 μm was designed and fabricated for the hyperspectral imaging system. Based on the characteristics of the reflective Offner convex grating dispersion, the optical substrate is divided into three areas with different working band to block the high-level spectra. The optical transmittance efficiency of each band is higher than 93%. Fine mask technique was adopted to ensure the size of adjacent area between different band less than 30 μm. The spectra utilization efficiency is improved effectively.

关 键 词：超光谱成像 光栅分光 高级次光谱 集成滤光片 

分 类 号：TB43[一般工业技术]