大口径光学元件修复用精密二维运动装置的优化设计  

Optimal Design of Precision Two-dimension Motion Stages for Repairing Large-aperture Optics

作　　者：赵林杰[1] 陈明君[1] 王娜君[1] 廖然[1] 李省伟[1] 

机构地区：[1]哈尔滨工业大学,哈尔滨150001

出　　处：《航空精密制造技术》2016年第4期10-13,共4页Aviation Precision Manufacturing Technology

摘　　要：为满足大口径光学元件精密修复用高精度二维运动装置的精度要求,利用ANSYS软件建立有限元模型,通过增加气浮支撑单元、肋板加强以及合理的减重处理,对龙门架中的承重板等薄弱环节进行优化设计。选取支撑气膜刚度作为变量,进行模态仿真,研究其对装置固有频率的影响。结果表明结构形变降低到14μm、最大应力9.15MPa远低于2Cr13的屈服极限、一阶固有频率提升至48.974Hz,即改善气浮支撑单元结构和供气参数,可使装置刚度有效增加。Using the ANSYS , the finite element model is established to optimize the supporting board which is the weakness in the portal frame, and the precision demand of the two-dimension motion stages developed for repairing large-aperture optics are required. Model simulation is performed in order to study the effect of gas film stiffness on stages stiffness. The analysis results indicate that： the structure deformation is reduced to 14μm, the largest stress is far less than the yield stress and the first order nature frequency is increased to 48.974 Hz, that means the stiffness of the device can be enhanced significantly by optimizing the air bearing element structure and gas supply parameters.

关 键 词：大口径 优化设计 模态分析 气浮 气膜刚度 

分 类 号：TH122[机械工程—机械设计及理论]