铁镍钼软磁合金粉体气相沉积绝缘包覆工艺研究  

Investigation in the technology of Fe-Ni-Mo based soft magnetic alloy powders coated with insulation material by gas phase diffusion deposition

作　　者：周炳贤 郭春生 刘波 王学钊 汪小明 饶汝聪 

机构地区：[1]广州新莱福磁电有限公司,广东广州510000 [2]兰州大学物理科学与技术学院,甘肃兰州730000

出　　处：《电子元件与材料》2016年第9期29-32,共4页Electronic Components And Materials

基　　金：广东省省级科技计划项目资助(No.2013B090500014)

摘　　要：从减小铁镍钼软磁合金器件的涡流损耗和磁滞损耗出发,解决传统包覆工艺存在的不足,提出将金属硅粉先经氯化生成三氯氢硅扩散沉积到粉体表面,再水解出二氧化硅并沉积在磁粉表面的方法制得绝缘包覆磁粉。此外,加入氧化钙与二氧化硅在1 200℃下反应生成硅酸钙来增加绝缘层的粘结力。结合SEM、XRD及EDS分析磁粉表面形貌及成分组成,采用LCR电桥测试磁粉芯磁性能。研究发现,该工艺制备出的绝缘膜层具有高粘结性、高电阻及耐高温的性质,显著降低了磁粉芯在1 MHz频率下的磁损耗。Proceeding from reducing the eddy current loss and hysteresis loss of the devices made by Fe-Ni-Mo soft magnetic alloy and resolving the shortcoming of the traditional coating technologies, the magnetic powder coated with insulation material was prepared by the process as follows： the metallic silicon powder was first chloridized to trichlorosilane and then hydrolyzed to silicon dioxide depositing on the surface of the magnetic powder. Additionally, calcium oxide was added to react with silicon dioxide at 1200 ℃ to form the calcium silicate which could increase the cohesion between the insulation coating and the coated surface. Surface morphology and chemical composition were tested by SEM, XRD and EDS, magnetic core properties were tested using LCR bridge. It is found that the insulation coating prepared by this technology possesses high adhesion, high resistance and high temperature resistance and reduces the magnetic loss of magnetic cores dramatically under the frequency of 1 MHz.

关 键 词：软磁合金 磁损耗 绝缘包覆 气相扩散沉积 金属硅 二氧化硅 

分 类 号：TB333[一般工业技术—材料科学与工程]