掺杂不同Mo含量对CrMoN薄膜摩擦磨损性能影响  

Influence of Mo-Content on Tribological Properties of CrMoN Coatings

作　　者：宋沂泽 高原 王成磊[2] 彭凯 

机构地区：[1]广西信息材料重点实验室,桂林541004 [2]桂林电子科技大学材料学院,桂林541004

出　　处：《真空科学与技术学报》2016年第8期886-890,共5页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金资助项目(51264007);国家自然科学基金青年基金(51201043);广西科学研究与技术开发科技攻关计划项目(桂科攻12118020-2-2-1);广西信息材料重点试验室项目(桂科能1210908-10-Z);桂林电子科技大学-桂林电科院研究生联合培养基地专项经费资助项目(20121225-10-Z;20121225-03-Z)

摘　　要：采用多弧离子镀技术,在4Cr13钢表面沉积CrN,并掺杂不同的Mo含量,形成CrMoN复合薄膜。研究不同Mo含量对CrMoN薄膜摩擦磨损性能的影响。通过扫描电镜、X射线衍射、显微硬度计、高速往复摩擦磨损试验机对CrMoN薄膜的成分、相结构和硬度、摩擦磨损特性及形貌进行了研究。实验结果表明:CrMoN复合薄膜形成了以NaCl型面心立方CrN结构为基础的(Cr,Mo)N结构;当Mo含量达到31.08%时,在(311)、(111)方向上出现Mo2N的衍射峰,此时薄膜出现了CrN、(Cr,Mo)N和Mo_2N相结构并存的情况;随着Mo含量的增加,薄膜的硬度先增加后减小;当Mo的含量为7.09%时,复合薄膜的硬度值最大,为2962.3HV;薄膜的磨损机理开始为粘着磨损,之后出现磨屑并破碎,出现磨粒磨损,此后磨损过程在是在粘着磨损和磨粒磨损共同作用下的结果;当Mo的含量为7.09%的CrMoN时,其摩擦系数最低约为0.4,最小磨损量为0.0223mm3。Mo含量分别为0.15%,4.23%,5.15%,14.26%,21.12%,31.08%时的CrMoN,其磨损量分别是Mo含量7.09%的CrMoN磨损量的22.12,17.83,12.88,1.44,3.43,1.22倍。The CrMoN coatings were deposited on substrate of 4Cr13 stainless steel by multi-arc ion plating（ MAIP）. The Influence of the Mo-content on the microstructures,phase-structures and tribological behavior of the coatings was investigated with scanning electron microscope,X-ray diffraction,and conventional mechanical probes.The results show that the Mo-content significantly affected the tribologial properties and phase-structures of the CrMoN coatings. For instance,as the Mo-content increased,the hardness of the coatings changed in an increase-decrease mode,peaking to 2962. 3HV at Mo-7.09%（ at.）; the abrasive loss varied in a decrease-increase manner.Synthesized at Mo-31. 08%,the coexistence of Cr N,（ Cr,Mo） N and Mo_2N phases replaced the dominance of Na Cltype fcc-phased（ Cr,Mo） N. At Mo-7.09%,the lowest friction coefficient and abrasion loss were found to be 0. 4and 0. 0223 mm^3,respectively. As the sliding went on,the adhesive wear mechanism gave way to adhesive and abrasive wear mechanisms.

关 键 词：多弧离子镀 CrMoN复合薄膜 摩擦磨损 硬度 

分 类 号：TP383[自动化与计算机技术—计算机系统结构]