亚波长二维光栅结构零级透射场的计算方法  

Calculation Zero-Order Transmittance for Sub-Wavelength Multilayered Two-Dimensional Gratings

作　　者：马平[1] 黄训铭[1] 邓浩[2] 石安华[1] 黄洁[1] 

机构地区：[1]中国空气动力研究与发展中心超高速所,四川绵阳621000 [2]电子科技大学物理电子学院,成都610054

出　　处：《兵器装备工程学报》2016年第8期155-159,共5页Journal of Ordnance Equipment Engineering

基　　金：国家重大基础研究发展计划项目(2014CB340202);国家自然科学基金项目(11272336)

摘　　要：基于散射度量术中测量掩膜版时对零级透射率波谱的计算需求,将需要阶梯近似分层的复杂二维光栅统一模型化为多层二维光栅,建立了多层二维光栅零级透射场计算方法;将Moharam传输矩阵法的部分解法推广到一般复杂二维光栅结构,实现对多层或者非垂直侧壁结构透射场的逐层迭代计算;对一种亚波长二维金属光栅阵列结构进行了宽谱光源入射下的透射特性仿真计算;结果表明:结合二维光栅模拟的收敛性改进算法,建立的计算方法能实现对复杂二维光栅透射率波谱的求解。Based on the needs for calculation of the zero-order transmittance spectrum in scatterometry,the complex two-dimensional gratings needed to divide into many echelons that are equivalent to multilayer twodimensional gratings. The computing method of the zero-order transmission field of those was put forward.The partial-solution of the enhanced transmittance matrix approach was generalized to arbitrary twodimensional gratings. This approach was shown to produce numerically stable iterative-calculation results for multilevel or slanted gratings. A sub-wavelength two-dimensional metallic grating was analyzed.Simulation results show that this approach is efficient for the calculation of transmittance for general twodimensional gratings with a preferred convergence-improved method. The computing method can be used to solve the transmissivity spectrum of the complex two-dimensional grating.

关 键 词：衍射 光栅 严格耦合波分析 传输矩阵法 散射度量术 

分 类 号：O436[机械工程—光学工程]