N型多孔硅/镍微米管复合材料的制备及其磁性能研究  

Fabrication and Magnetic Properties of N-type Porous Silicon/Nickel Microtubes Composite

作　　者：周辉[1] 韩满贵[1] 唐中开 吴燕辉[1] 

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,国家电磁辐射控制材料工程技术研究中心,成都610054

出　　处：《无机材料学报》2016年第8期855-859,共5页Journal of Inorganic Materials

基　　金：国家自然科学基金重点项目(61271039);四川省科技项目(2015HH0016)

摘　　要：通过背光照辅助电化学腐蚀的方法,在N型轻掺杂的(100)单晶硅上制备了多孔硅模板。模板孔端口呈类正方形结构,孔边长约为2μm,孔深约50μm。然后在制备的N型多孔硅模板中电沉积制备了磁性镍微米管。与绝缘性AAO模板中金属从孔底部开始生长不同,在半导体性质的N型多孔硅模板中,镍沿着孔壁均匀生长,并随着沉积时间的延长,由颗粒状逐渐生长为微米管,镍的晶型没有发生变化。由于镍微米管的缺陷和晶界比镍颗粒更少,畴壁位移更容易,所以具有更小的矫顽力。同时受强烈的退磁能影响,外加磁场在垂直和平行镍微米管方向时测得的磁滞回线表现出明显的磁各向异性。The highly ordered n-type porous Si template was prepared via electrochemical etching and back side illumination method. Pores of the Si template had squarish shape with side length of about 2 μm and depth of about 50 μm, respectively. Three growth stages, nucleation, self-assembly, and stable growth were observed by scanning electron microscope（SEM） during the formation process of the porous n-silicon template. Subsequently, nickel microtubes arrays were synthesized by electro-deposition. And the formation mechanism of the microtubes was also investigated. The content and particle size of Ni particles embedded in n-type porous Si templates increase with the increase of deposition time. Ni microtubes are formed by gathering the Ni particles over pore sidewall, which is different from that of insulative AAO template. In addition, the crystal structure of Ni microtubes keeps fcc-Ni in the whole growth process. In particular, due to the fewer defects and grain boundaries of Ni microtubes than that of Ni particles, the coercivity value of Ni microtubes is smaller. Moreover, the magnetic anisotropy of Ni microtubes is mainly contributed to the strong demagnetization energy.

关 键 词：N型多孔硅 电化学沉积 镍微米管 磁各向异性 

分 类 号：TQ153[化学工程—电化学工业]