提高氦质谱检漏仪检漏压力的研究  

Study on Improvement of Helium Leak Detector Pressure

作　　者：黄文平 朱长平 

机构地区：[1]安徽皖仪科技股份有限公司,安徽合肥230088

出　　处：《中国仪器仪表》2016年第8期52-55,共4页China Instrumentation

基　　金：国产高速小型复合分子泵在氦质谱检漏仪上的应用(项目编号:2013YQ13042907)

摘　　要：从讨论逆扩散型氦质谱检漏仪检漏压力出发,提出一种可以提高检漏压力的方法,并通过实验分析这种高压下的检漏范围、仪器本底、信号响应与清除时间,以及这种高压下检漏需要注意的问题。This paper based on the testing pressure of reverse diffusion type helium mass spectrometer leak detector,we proposed a new method to enhance the testing pressure. Additionally, experimental researchgave different responses for detection range,background signal, signal response and clearing time under high-pressure environment. By the way, some matters needing attention when using helium mass spectrometer leakage detecting under high-pressure have also been discussed in the paper.

关 键 词：氦质谱检漏仪 检漏压力 检测范围 清除时间 

分 类 号：TB774.3[一般工业技术—真空技术]