点衍射波前无镜头干涉测量中横向偏移误差校正方法  

Lateral Displacement Error Calibration Method for Point-Diffraction Wavefront Interferometric Measurement Without Imaging Lens

作　　者：徐杨波 王道档[1] 王志超[1] 刘维[1] 孔明[1] 赵军[1] 朱保华[2,3] 

机构地区：[1]中国计量大学计量测试工程学院,浙江杭州310018 [2]桂林电子科技大学广西自动检测技术与仪器重点实验室,广西桂林541004 [3]广西高校光电信息处理重点实验室,广西桂林541004

出　　处：《光学学报》2016年第8期158-165,共8页Acta Optica Sinica

基　　金：国家自然科学基金(11404312;51476154;51404223;51375467);国家留学基金(201408330449);浙江省自然科学基金(LY13E060006;Q14E060016);浙江省"仪器科学与技术"重中之重学科开放基金(JL150508;JL150502);广西高校光电信息处理重点实验开放基金(KFJJ2014-03);广西自动检测技术与仪器重点实验开放基金(YQ15204);广西自然科学基金(2013GXNSFDA019002;2014GXNSFGA118003)

摘　　要：为了最大程度减少误差环节,点衍射球面波前精度的干涉测量中通常采用无镜头测量方式。点衍射干涉波前在大数值孔径与大横向偏移量情况下存在的结构误差将严重影响测量精度,且无法利用传统方法加以校正。针对该问题,提出了一种基于三坐标重构以及对称偏移补偿的点衍射干涉波前测量中结构误差的高精度校正方法,以实现对大数值孔径及大横向偏移点衍射球面波前无镜头成像测量中的结构误差校正。该方法首先采用三坐标重构方法对系统误差进行预校正,再针对干涉中点源横向偏移引入误差存在的对称性,采用对称横向偏移补偿对由三坐标重构误差而引入的残余结构误差进一步校正。分别进行了数值仿真和测量实验对所提出方法的可行性进行了验证。结果表明,该方法达到了λ/10000的校正精度,对于点衍射球面波前高精度测量标定以及非镜头成像干涉检测中结构误差的高精度校正具有重要的应用意义。In order to minimize the error,the non-lens imaging method is applied in the interferometric measurement of point-diffraction spherical wavefront precision.In the case of high numerical aperture and large lateral displacement,significant additional systematic error can be introduced into point-diffraction wavefront measurement result,and it cannot be removed with traditional calibration method.A high precision calibration method of structure error for point-diffraction wavefront interferometric measurement based on three-dimensional coordinate reconstruction and symmetric displacement compensation is proposed to calibrate the systematic error introduced by high numerical aperture and large lateral displacement in the measurement of point-diffraction spherical wavefront with non-lens imaging.Firstly,three-dimensional reconstruction method is used to pre-calibratethe symmetric error.Then,because the error introduced by point source lateral displacement in interferometric measurement is symmetric,the symmetric lateral displacement compensation is applied to further correct the residual structure error due to three-dimensional coordinate reconstruction error.Both the numerical simulation and experimental measurements are carried out to verify the feasibility of the proposed calibration method.According to the analyzing results,the calibration method can reach the correction precision better thanλ/10000.The proposed calibration method is of great significance for the application of high precision calibration of structure error introduced by non-lens imaging interferometric measurement and high-accuracy measurement calibration of pointdiffraction spherical wavefront.

关 键 词：测量 点衍射波前 结构误差 无镜头成像 

分 类 号：O436.1[机械工程—光学工程]