聚焦离子束外置取出法制备SiC_p/Al透射电镜样品  

FIB with External Picking up on Making SiC_p/Al Simples for TEM

作　　者：胡莹[1,2] 陈圣[2] 张澜庭[1] 

机构地区：[1]上海交通大学材料科学与工程学院,上海200240 [2]宝山钢铁集团中央研究院,上海201900

出　　处：《实验室研究与探索》2016年第8期64-66,共3页Research and Exploration In Laboratory

基　　金：国家重点基础研究发展计划(2012CB619600)

摘　　要：SiC颗粒增强铝合金复合材料(SiC_p/Al)由于结构复杂,在结构分析工作中既需要定点取样,又需要尽可能大的观察区域以满足对各结构单元之间相互作用的研究,故透射电子显微镜(TEM)样品制备工作存在较大的困难。采用聚焦离子束(FIB)外置取出方法制备TEM样品,在真空室内切割出较大面积的薄片样品,并将其在真空室外取出,置于覆膜铜网上。由于一片覆膜铜网上可以承载多片样品,这样一次进样可以对多个区域进行观察。实验结果证实样品可观察区域足够,样品质量满足TEM要求,观察效率高,同时由于这种方法高效低成本的特点,在相近材料和一些实验量庞大的材料结构解析工作中具有可推广性。There are difficulties in the transmission electron microscope（ TEM） sample preparation of SiC particles reinforced Al-based composite（ SiC_p/ Al） due to the complexity of phase constitute,since it needs positional sampling and large range of observation for studying the nexus between SiC and other constituted phases. In the present work,focused ion beam（ FIB） with external picking up was chosen in making simple for TEM. The samples are made into sheet with large area in the vacuum chamber and removed and placed on an attached membrane net outside the vacuum chamber. A plurality of regions can be observed in single sample injection,due to there are multi-chip samples on an attached membrane net. The method was thus proven to be applicable to study the structure of SiC_p/ Al by TEM. The mother can be used in other materials for high-efficiency and low-cow.

关 键 词：聚焦离子束 外置取出 SICP/AL 

分 类 号：TG115.215.7[金属学及工艺—物理冶金]