AlTiSiN/AlCrSiN纳米多层复合涂层的结构及性能研究  

Microstructure and Mechanical Properties of AlTiSiN/AlCrSiN Multilayer Coatings

作　　者：杨兵[1] 刘琰[1] 刘辉东[1] 罗畅[1] 万强[1] 蔡耀[1] 陈浩[1] 陈燕鸣[1] 

机构地区：[1]武汉大学动力与机械学院,武汉430072

出　　处：《中南民族大学学报（自然科学版）》2016年第3期13-16,共4页Journal of South-Central University for Nationalities：Natural Science Edition

基　　金：国家自然科学基金资助项目(11275141)

摘　　要：以AlTiSi合金和AlCrSi合金为靶材料,采用阴极电弧离子镀技术在单晶硅、硬质合金基底上沉积AlTiSiN/AlCrSiN纳米晶多层复合涂层,系统研究了氮气压强变化对AlTiSiN/AlCrSiN复合涂层结构和力学性能的影响.利用扫描电镜和X射线衍射仪分析了涂层的形貌和相结构,用显微硬度计和摩擦磨损仪测量了涂层显微硬度和摩擦系数.结果表明:氮气压强对涂层微结构和性能具有较大影响,涂层是以NaCl型TiN和CrN相结构为主的多晶材料.由于多元素掺杂导致复合涂层的衍射峰与纯TiN和CrN衍射峰位相比发生一定的偏移.随着氮气压强的增大,涂层的衍射峰强度逐渐降低并宽化,说明随着氮气压强的增大晶粒尺寸减小.涂层表面的颗粒污染和沉积气压密切相关,随气压增加污染颗粒尺寸逐步减少,涂层表面粗糙度降低;当氮气压从2.0Pa增加到4.0Pa时涂层的硬度值由2437.9HK逐渐增大至3221.5HK;涂层摩擦学性能也和氮气压密切相关,当氮气压强低于3.0Pa时,平均摩擦系数约0.410;而在氮气压强高于3.0Pa后,平均摩擦系数逐渐降至0.258.AlTiSiN/AlCrSiN nanocomposite coatings were deposited on Si and cemented carbide substrate using AlTiSi, AlCrSi cathodes by vacuum cathodic arc evaporation. The influence of N2 pressure on the structure and mechanical properties of the coatings were investigated systematically. The morphology and phase structure were investigated by SEM and XRD. The micro hardness and coefficient of friction were measured by the micro hardness tester and friction and wear tester. The results showed that N2 pressure had great influence on the microstructure and mechanical properties of the coatings. The coatings were polycrystalline which exhibited NaCl-type TiN and CrN phase. The diffraction peaks of the coatings had a certain deviation due to the multi element doping compared with the pure TiN and CrN diffraction peaks.With the increase of N2 pressure, the intensity of the diffraction peaks of the coating decreased and widened gradually, suggesting that the grain size decreased with the increase of the N2 pressure. The particle pollution was closely related to the deposition pressure. The particle size and the surface roughness decreased with the increase of the pressure. The coating hardness increased from 2437. 9 HK to 3221. 5 HK gradually when N2 pressure increased from 2. 0 Pa to 4. 0 Pa. The tribological properties of the coatings were also closely related to nitrogen pressure. When the pressure was lower than 3. 0 Pa, the average friction coefficient was about 0. 410, while the average friction coefficient decreased to 0. 258 when N2 pressure was higher than 3.0 Pa.

关 键 词：电弧离子镀 AlTiSiN/AlCrSiN复合涂层 氮气压强 显微硬度 摩擦系数 

分 类 号：TG174.444[金属学及工艺—金属表面处理]