转轴激光多自由度运动误差测量综述  

Review on Multi-Degree-of-Freedom Motion Error Measurement Methods for Rotary-Axis Laser

作　　者：杨婧[1] 冯其波[1] 李家琨[1] 

机构地区：[1]北京交通大学理学院光电检测技术研究所,北京100044

出　　处：《激光与光电子学进展》2016年第9期23-33,共11页Laser & Optoelectronics Progress

基　　金：基本科研业务费(2015JBM092)

摘　　要：转轴为旋转运动提供了基准,是精密测量、加工、控制等设备的重要运动部件之一,在高端加工制造、航空航天、光学分析等领域具有重要地位。转轴在转动时具有六自由度几何运动误差,通过对六自由度误差的测量,建立误差补偿模型进行误差补偿,是目前世界上普遍采用的用于提高精密测量、加工、控制等设备精度的主要途径之一。综述了现有转轴激光多自由度误差测量方法,并分析了各种方法的优缺点,讨论了其发展趋势。Rotary axis is considered as the basis for rotational motion. It is a key component in precision measuring, machining and controlling equipments, and it plays a crucial role in high-end manufacturing, aerospace, and optical analysis fields. Each rotary axis has six degree-of-freedom translational and rotational errors. To improve the equipment accuracy, one of the commonly applied solutions is to measure the six degree-of-freedom errors and then to establish the error compensation model to compensate these errors. The progress in methods to measure the multi-degree-of-freedom motion errors in a rotary axis based on laser is reviewed, the principle, pros and cons of these methods are analyzed, and the trend in the field is discussed as well.

关 键 词：测量 转轴 多自由度运动误差 转角定位误差 

分 类 号：TH741[机械工程—光学工程]