Ag-B靶材热压制备及致密化过程研究  

Preparation of Ag-B Target by Hot Pressing and Densification

作　　者：曹子宇[1] 刘宇阳[1] 桂涛[1] 白雪[1] 杨磊[1] 王星明[1] 

机构地区：[1]北京有色金属研究总院稀有金属冶金材料研究所,北京100088

出　　处：《稀有金属》2016年第10期1038-1044,共7页Chinese Journal of Rare Metals

基　　金：国家自然科学基金项目(31201)资助

摘　　要：以化学组成Ag∶B=93∶7（质量比）的混合粉体为原料,采用热压烧结制备Ag-B靶材。通过阿基米德法测量靶材密度、扫描电镜（SEM）观察靶材断面形貌、X射线衍射仪（XRD）分析物相、差示扫描量热法（DSC）分析粉体相变,研究了热压工艺对靶材致密度和微观组织的影响,并探讨了Ag-B靶材的致密化过程。结果表明：Ag-B粉体在升温至1000℃过程中,Ag,B之间未形成固溶体或金属间化合物,但B的加入降低了Ag-B粉体的熔化潜热;在450~750℃温度范围内,温度升高靶材相对密度从81.8%增加至95.3%;烧结温度超过750℃后,出现“反致密化现象”,800℃时靶材相对密度下降至89.2%;Ag-B靶材的相对密度随着热压压力、保温保压时间的增加而增加;相比较而言,烧结温度和保温保压时间是Ag-B靶材致密化的主要因素;在烧结温度750℃、保温保压时间120 min、压强28 MPa条件下,Ag-B靶材致密度达到95.3%。Ag-B target was prepared by hot pressing using Ag and B powder with mass ratio of 93 ： 7. The density of target was meas- ured by Archimedes method ; the fracture morphology of Ag-B target was observed by scanning electron microscope （SEM） ; the phase structure was measured by X-ray diffraction （XRD） ; differential scanning calorimetry （DSC） curves were analyzed by differential scanning calorimeter. The effects of hot pressing conditions including temperature, pressure and preserving time on relative density and microstructure were investigated and the densification process of Ag-B target was studied. The results indicated that DSC curves showed that no Ag-B alloy or AgB compound was found under temperature of up to 1000 ~C, but the fusion latent heat of Ag-B powder decreased because of B; with temperature increasing from 450 to 750 ~C, the relative density increased constantly from 81.8% to 95.3% ; however when temperature increased from 750 to 800 ~C, the relative density decreased from 95.3% to 89.2% , and the phenomenon of ＂anti-densification＂ occurred ; with preserving time and pressure increasing, the relative density of Ag-B target increased. Relatively, pressure, temperature and preserving time were key factors of Ag-B densification process ; the relative density of 95.3 % for Ag-B target was achieved at temperature of 750 ℃, preserving time of 120 min and pressure of 28 MPa.

关 键 词：银硼靶材 热压烧结 微观结构 致密化 

分 类 号：TB333[一般工业技术—材料科学与工程]