主轴回转误差引入飞切加工表面微波纹的形成机理与解决方案  

Formation and solving for the micro-waves of fly-cut surface introduced by spindle error

作　　者：孙郅佶[1,2] 毕果[1] 安晨辉[2] 王振忠[1] 雷向阳[2] 张清华[2] 

机构地区：[1]厦门大学物理与机电工程学院,福建厦门361005 [2]成都精密光学工程研究中心,成都610041

出　　处：《振动与冲击》2016年第20期197-202,共6页Journal of Vibration and Shock

基　　金：基金项目:高档数控机床与基础制造装备<强激光光学元件超精密制造关键装备研制>(2013ZX04006011-102-001)

摘　　要：为分析超精密飞切机床加工表面微波纹的形成机理,研究了主轴回转误差信息提取与表面形貌仿真技术,获取微波纹误差来源并研究解决方案。首先,在超精密飞切机床主轴上搭载五通道在线电容位移检测系统,并对采集到的信号进行误差分析提取。然后,建立飞切加工表面微观形貌三维仿真模型,仿真分析主轴误差引入的加工表面微波纹,并与表面检测结果比对确定误差来源。最后,通过调整主轴电机控制系统抑制该误差。三维仿真和实测结果相吻合,证实超精密飞切机床主轴转速波动导致的回转误差造成了工件表面1 Hz左右的规律性条纹,对主轴转速控制系统进行数字化改造后,基本消除了该因素导致的表面微波纹,表面粗糙度从5 nm以上抑制到2 nm左右,PV值优于10 nm。超精密飞切机床主轴转速波动会对飞切加工表面微观形貌以及表面粗糙度产生显著影响,需至少控制在0.5 r/min以内。In order to find out the formation mechanism of micro-waves on the fly-cut surface, the spindle motion error was sampled and a 3D topography simulation model was compiled. Firstly, a nano-class testing and evaluation system was established on the fly cutting machine, the displacement data was sampled and the spindle motion error was analyzed. Then a 3D surface profile topography simulation model was established to analyze the micro-waves caused by the spindle motion error. The simulated surface was compared with the measured surface to find out the error sources. Finally, the characteristics of spindle were improved by adjusting the control system of the spindle motor. The simulated 3D surface profile topography was similar to that of the measured profile, which verified that the macro-waves was caused by the undulate of the spindle speed. When the spindle characteristics was improved, the macro-waves caused by the spindle motion error almost disappeared, and the surface roughness reduced from more than 5 nm to 2 nm. It is thus concluded that the undulate of ultra-precision fly cutting machine spindle speed causes macro-waves on the work-piece surface, and the undulate spindle speed must less than 0. 5 r/min.

关 键 词：超精密飞切加工 主轴回转误差 粗糙度 微波纹 

分 类 号：TH133.36[机械工程—机械制造及自动化]