Near-field holography enhanced with antireflection coatings--an improved method for fabricating diffraction gratings  

作　　者：李媛芳 陈火耀 Stefanie Kroker Thomas K?sebier 刘正坤 邱克强 刘颖 Ernst-Bernhard Kley 徐向东 洪义麟 付绍军 

机构地区：[1]National Synchrotron Radiation Laboratory,University of Science and Technology of China [2]Institut für Angewandte Physik,Friedrich-Schiller-Universit?t Jena [3]Technische Universit?t Braunschweig,Laboratory for Emerging Nanometrology [4]Physikalisch-Technische Bundesanstalt

出　　处：《Chinese Optics Letters》2016年第9期1-5,共5页中国光学快报（英文版）

基　　金：supported by the Sino-German Center for Research Promotion (No.GZ 983);the German Science Foundation DFG (No.IRTG 2101);the Joint Fund of the National Natural Science Foundation of China;the China Academy of Engineering Physics (No.U1230104)

摘　　要：Near-field holography（NFH）, with its virtues of precise critical dimensions and high throughput, has a great potential for the realization of soft x-ray diffraction gratings. We show that NFH with reflections reduced by the integration of antireflective coatings（ARCs） simplifies the NFH process relative to that of setups using refractive index liquids. Based on the proposed NFH with ARCs, gold-coated laminar gratings were fabricated using NFH and subsequent ion beam etching. The efficiency angular spectrum shows that the stray light of the gratings is reduced one level of magnitude by the suppression of interface reflections during NFH.Near-field holography（NFH）, with its virtues of precise critical dimensions and high throughput, has a great potential for the realization of soft x-ray diffraction gratings. We show that NFH with reflections reduced by the integration of antireflective coatings（ARCs） simplifies the NFH process relative to that of setups using refractive index liquids. Based on the proposed NFH with ARCs, gold-coated laminar gratings were fabricated using NFH and subsequent ion beam etching. The efficiency angular spectrum shows that the stray light of the gratings is reduced one level of magnitude by the suppression of interface reflections during NFH.

关 键 词：Antireflection coatings COATINGS Gold coatings HOLOGRAPHY Ion beams Refractive index Spectrum analysis Stray light X ray diffraction 

分 类 号：TN25[电子电信—物理电子学] O434.1[机械工程—光学工程]