TiAlN和TiCrAlSiCN硬质薄膜微观结构与摩擦学性能研究  

Microstructure and Tribological Properties of TiAlN and TiCrAlSiCN Hard Coatings

作　　者：郭岩[1] 李巍[1] 刘立营[1] 李太江[1] 王彩侠[1] 

机构地区：[1]西安热工研究院有限公司,西安710032

出　　处：《真空科学与技术学报》2016年第9期1060-1065,共6页Chinese Journal of Vacuum Science and Technology

基　　金：西安热工研究院有限公司研究开发基金项目(TN-15-TYK05)

摘　　要：为改善H13钢的耐磨性能,本文采用工业型多弧离子镀设备在H13钢表面沉积耐磨硬质薄膜。借助扫描电子显微镜、X射线衍射仪、X射线光电子能谱仪、透射电子显微镜、维氏硬度计、摩擦磨损仪测试与分析TiAlN和TiCrAlSiCN薄膜的微观结构、硬度和摩擦学性能。低Al含量的TiAlN薄膜含面心立方结构的TiAlN固溶体和金属Ti相,TiAlN的200晶面呈择优取向;高Al含量的TiAlN薄膜为面心立方结构的TiAlN固溶体,111晶面呈择优取向。低Al含量的TiAlN薄膜硬度低(1871HV_(10 g))、高摩擦系数(0.8)和高磨损率(9.53×10^(-6)mm^3/N·m),高铝含量的TiAlN薄膜具有高硬度(3521 HV_(10 g))、摩擦系数明显下降(0.59)。TiAlN薄膜中加入Cr、Si和C元素形成的TiCrAlSiCN薄膜,其结构为纳米晶和非晶的复合结构,摩擦系数和磨损率降低是由于非晶相起减摩作用、纳米晶氮化物起耐磨作用;尤其低Si高C含量TiCrAlSiCN薄膜具有低摩擦系数(0.48)和磨损率(7.28×10^(-6)mm^3/(N·m)),高硬度(3613 HV_(10 g))。The TiAlN and TiCrAlSiCN coatings were deposited by multi-arc ion plating on H13 steel substrate.The influence of the Al-content and co-doping of Cr,Si and C on the microstructures and tribological properties of the TiAlN coatings was investigated with scanning electron microscopy,X-ray diffiraction,X-ray photoelectron spectroscope. transmission electron microscopy,and mechanical probes. The results show that the Al-content and co-doping of Cr,Si and C significantly improve the tribological behavior of the TiAlN coatings. For example,as the Alcontent increased. the preferential growth orientation of the fec-TiAlN solid solution and bcc-Ti changed from 〈200〉 into 〈111〉 of fcc-TiAlN;the micro-hardness increased from 1871 HV（10 g）to 3521 HV（10 g）;thefriction-coefficient decreased from 0. 8 to 0. 59. Co-duped with low Si-content and high C-content,the TiCrAlSiCN coatings display a micro-hardness of 3613 HV（10 g）,a friction-coefficient of 0. 48,and a wear-resistance of 17. 28 × 1016 nm^3/ N·m,possi-bly because of formation of amorphous / nano-phased composite.

关 键 词：TIALN TiCrAlSiCN 微观结构 显微硬度 摩擦学性能 

分 类 号：TG174.44[金属学及工艺—金属表面处理]