基于悬浮式石墨烯的应变传感器发展概述  

The development overview of strain sensor based on suspension graphene

作　　者：张玮峰[1] 李晓莉[1,2] 张子生[1] 尚雅轩[2] 李晓苇[1] 

机构地区：[1]河北大学物理科学与技术学院河北省光电信息材料重点实验室,河北保定071002 [2]中国科学院半导体研究所半导体超晶格国家重点实验室,北京100038

出　　处：《信息记录材料》2016年第4期10-13,共4页Information Recording Materials

基　　金：国家自然科学基金青年科学基金项目(批准号:11504077)

摘　　要：石墨烯材料具有独特的机械与电学性质,迅速成为当前科研的热点。基于石墨烯构建应变传感器,不仅可以丰富传感器的构建材料,而且借助石墨烯特有的性质,可以研制出比硅性能更优异的应力传感器。本文介绍了近些年来悬浮式石墨烯应变传感器的设计与制造技术的发展,介绍了传感器的结构、原理、灵敏度等性能,阐述了对传感器的结构和性能进行改进和优化的过程。基于悬浮式石墨烯的应变传感器可应用于纳机电系统(NEMS),在医学、生物等纳米领域具有巨大的应用潜力。Graphene materials with unique mechanical and electrical properties,so quickly became a focus of research.Based on graphene strain sensor can not only enrich the sensor construction materials,and with the help of graphene characteristic,can develop more excellent performance than silicon stress sensor.This paper introduces the design of suspension graphene strain sensors in recent years with the development of manufacturing technology.The structure and principle of the sensor are described,such as sensitivity performance.This paper expounds the structure and performance of the sensor was improved and optimized process.Strain sensor based on suspension graphene,can be applied to nano electromechanical systems（NEMS）,in the field of medical and biological nanometer,has great application potential.

关 键 词：石墨烯 悬浮式 应变传感器 压力灵敏度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]