基于双环法回转体测量机在线温度误差补偿  

Online thermal error compensation of rotatory measuring machines based on bicyclic law

作　　者：钟莹[1] 刘佳[1] 李杏华[1] 

机构地区：[1]天津大学精密测试技术与仪器国家重点实验室,天津300072

出　　处：《中南大学学报（自然科学版）》2016年第9期2992-2996,共5页Journal of Central South University:Science and Technology

基　　金：国家自然科学基金资助项目(51105272)~~

摘　　要：为补偿回转体测量机的测量误差,深入分析测量机结构热变形误差的表现形式,在此基础上,建立热误差补偿数学模型。提出一种基于双环法的在线温度误差补偿技术,通过实物测量,实时获取参考基准的测量误差,通过计算得到测量架的平移和倾斜误差,对工件不同高度的外径和内径热误差进行实时补偿。实验结果表明:回转体测量机经过在线温度误差补偿后,测量的稳定性误差从110μm下降到7μm,显著提高了测量的稳定性。该方法可以满足回转体类零件对高可靠性和高精度测量的要求,提高回转体测量机在线测量精度和效益,为回转体测量机的在线温度误差补偿提供了一种新的技术途径。In order to compensate thermal error for rotatory measuring machine, the measuring machine＇s structure manifestation of thermal deformation error was analyzed, on this basis of which the mathematical model of thermal error compensation was established. The method was proposed based on bicyclic law of online temperature error compensation technology. Through in-kind measurement, workpieces＇ offset and tilt errors were calculated by achieving real-time measurement error of reference benchmark to compensate thermal errors of different heights of workpieces of both outside and inside diameters in real time. The results show that the error of the measuring stability error is reduced from 110μm to 7 μm after compensation, improving measuring stability significantly. The compensation method can satisfy the need of rotating parts for high reliability and precision measurement, improving rotatory measuring machine＇s online measurement accuracy and efficiency, as well as providing new method of compensating thermal error for rotatory measuring machines.

关 键 词：回转体测量机 热误差补偿 双环法 平移 倾斜 

分 类 号：TH161.4[机械工程—机械制造及自动化] TH711