高空湿度探测用加热式湿度传感器的研制  

Research and Fabrication of the Heater Integrated Humidity Sensor for the Radiosonde Humidity Sounding

作　　者：董鹏 边旭明 赵宏忠 林树超 邓娟 黄晓杰 彭文武 

机构地区：[1]北京航天微电科技有限公司,北京100854

出　　处：《传感技术学报》2016年第7期1000-1005,共6页Chinese Journal of Sensors and Actuators

基　　金：公益性行业(气象)科研专项项目(GYHY201106040)

摘　　要：为实现高空高湿环境下对湿度的准确测量,本文设计和研究了集成加热功能的湿度传感器,在探空仪进行高空湿度探过程中利用两只加热式湿度传感器进行轮流加热除湿和湿度测量。通过对聚酰亚胺湿敏材料进行改性和合成,设计和制作了加热式的电容型湿度传感器,其灵敏度为0.219 5 p F/%RH、响应时间小于1 s、湿滞为4.8%RH、半年漂移量在±0.3%RH以内。通过分析不同温度下的加热恢复时间,制定了加热式湿度传感器轮流工作的机制,轮流加热时间和周期分别为2 s和120 s。并利用数据采集电路以及GPS探空仪对加热式湿度传感器进行了地面静态性能和高空动态性能测试,其高空湿度探测结果与VA SALA RS92的显示出较好的一致性和较低的湿度误差。本文研制的加热式湿度传感器能具有良好的地面性能,实现了交替加热除湿和湿度测量的功能,具有高空湿度探测的应用潜力。In order to realize the accurate humidity measurement in the high altitude environment,the heater integrated humidity sensor is developed and investigated. This humidity sensor is used in the radiosonde humidity sounding by two heating-type humidity sensors’alternate heating dehumidification and humidity measurement. This paper reports the design and fabrication of the on-chip heating-type capacitive humidity sensor based on modified synthesis of the polyimide humidity sensitive materials. The ground experimental results indicate that the sensitivity is 0.219 5 pF/%RH,the response time is less than 1 s,the humidity hysteresis is about 4.8%RH,and the humidity drift in six months is less than ＆#177;0.3%RH. By analyzing the recovering time under different temperature, the working mechanism of two humidity sensors’alternate heating is formulated. The formulated heating time and period are 2 s and 120 s,respectively. It investigates the ground and sounding performance of heating-type humidity sensor by using the data acquisition circuit and GPS radiosonde,and the humidity sounding result is well in line with that of VAISALA RS92. In conclusion,the heating-type humidity sensor has good ground performance,achieves alternate heating dehumidification and humidity measurement,and has a good potential in radiosonde humidity sounding.

关 键 词：湿度传感器 高空湿度探测 加热式 湿敏电容 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]