两丝球形气流式倾角传感器敏感机理的研究  

Study on the Sensitive Mechanism of the Flow Inclination Sensor With Two-wire Spherical Sensitive Cavity

作　　者：朴林华 朴然 丁霞[3] 段磊 常兴远 PIAO Linhua PIAO Ran DING Xia DUAN Lei CHANG Xingyuan(Beijing Key Lab. for Sensor, Beijing Information Science Technology University, Beijing 100101,China The High School Attached to Tsinghua University,Beijing 100084,China School of Physics Mathematics, Qingdao University of Science Technology, Qingdao 266061, China)

机构地区：[1]北京信息科技科技大学北京市传感器重点实验室,北京100101 [2]清华大学附属中学,北京100084 [3]青岛科技大学数理学院,山东青岛266061

出　　处：《压电与声光》2016年第5期708-712,共5页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(60772012);北京市自然科学基金资助项目&北京市教委科技计划重点基金资助项目(KZ201511232034);北京市重点实验室开放课题基金资助项目;北京市新世纪百千万人才工程培养基金资助项目;现代测控技术教育部重点实验室基金资助项目;促进高校内涵发展-学科建设类基金资助项目;北京信息科技大学研究生科技创新基金资助项目

摘　　要：采用有限元法(FEM)计算了两丝球形敏感元件内的温度场和流场,解释和验证了该结构传感器的敏感机理。计算结果和实验表明,两丝球形敏感元件内的流场和温度场随倾角θ发生变化;倾斜时等温线不再左右对称,高温等温线重叠部分减少;θ=0°时,热敏电阻丝r1、r2的平均温度差ΔT=0;θ=10°时,ΔT=7.31K;θ=20°时,ΔT=13.64K。ΔT随着θ变化的平均灵敏度为0.707K/(°);倾斜时位置偏高的热敏电阻丝平均温度高,θ和ΔT基本呈线性关系;与实测值相比,理论值偏大,平均相对偏差为4.5%;热敏电阻丝r1、r2的温度差ΔT随着倾角θ变化,引起两热敏电阻丝阻值改变,检测电桥输出一个对应于倾角θ的不平衡电压ΔV。该文采用的方法为两丝球形敏感腔结构气流式倾角传感器的结构优化和性能改进开辟了有效的研究途径。The temperature field and stream field of the two-wire spherical sensitive element are calculated by using the finite element method（FEM）,and the sensitive mechanism of the sensor is explained and verified.The numerical results and experimental results show that the temperature field and stream field of the two-wire spherical sensitive element change with the inclination angleθ.When the inclination of the isotherms is no more symmetrical,the overlap of the high temperature isotherm is reduced;whenθ=0°,the average temperature difference of thermal resistance r1 and r2isΔT=0,whenθ=10°,ΔT=7.31 K,whenθ=20°,ΔT =13.64 K.The average sensitivity ofΔTchanging withθis 0.707K/（°）.When the closed spherical cavity is inclined,the average temperature of the thermal resistance wire with high position is higher,θandΔTare almost linear relationship;the average relative deviation is 4.5% compared with the measured values.The temperature differenceΔTof thermal resistance r1 and r2changes withθ,which causes the thermal resistance r1 and r2to change,the detection of bridge outputs a unbalanced voltageΔVcorresponding toθ.The proposed method have opened up an effective way for structure optimization and performance improvements of the structure of the flow inclination sensor with two-wire spherical sensitive cavity.

关 键 词：有限元法(FEM) 气体摆 对流场 敏感机理 温度场 温差 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]