基于ANSYS的面内压电微驱动器有限元分析  

Finite Element Analysis of a Piezoeletric Microactuator in Horizontal-plane Based on ANSYS

作　　者：赵玉侠[1] 任森[1] 狄杰建[1] 赵全亮[1] ZHAO Yuxia REN Sen DI Jiejian ZHAO Quanliang(School of Mechanical and Materials Engineering, North China University of Technology, Beijing 100041, China)

机构地区：[1]北方工业大学机械与材料工程学院,北京100041

出　　处：《压电与声光》2016年第5期713-716,共4页Piezoelectrics & Acoustooptics

基　　金：北京市市教委科技计划基金资助项目(KM201410009001);国家自然科学基金资助项目(51305005);北京市自然科学基金资助项目(3122013)

摘　　要：设计了一种新型水平面内微驱动器,其具有结构简单,响应速度快,输出位移大的特点。通过ANSYS软件建立了微驱动器的有限元模型,并对其进行压电分析,获得y、z向的变形图,其输出端的y、z向位移分别为0.61μm和1.13μm。经过模态分析获得微驱动器的前五阶共振频率,并提取了前三阶振型图,研究结果可知共振状态对微驱动器工作的影响状况。对微驱动器的关键尺寸进行了参数化研究,可对微驱动器的进一步设计提供理论指导。A novel microactuator in horizontal-plane is designed,which has the features of simple structure,fast response and large output displacement.The fininte element model was built based on ANSYS,the y-diretion and zdiretion deformation figures are obtained through piezoeletric analysis,they-diretion dispacement and z-diretion displacement value of the driving end is 0.61μm and 1.13μm respectively.Through the modal analysis the first five nature frequencies and three nature mode shapes are gained,the resonance effect on the microactuator can be seen from the nature mode shapes.The parametric study of the critical size is carried out.It can provide a theoretical guaidance for the future design of microactuator.

关 键 词：水平面内 压电微驱动器 有限元分析 ANSYS软件 模态 

分 类 号：TM282[一般工业技术—材料科学与工程]