声表面波应变传感器的温度补偿方法研究  

Research onTemperature Compensation of Surface Acoustic WaveStrain Sensor

作　　者：郭霄鹏[1,2] 袁策[1] 朱波[3] 柯亚兵[2] 李红浪[2] GUO Xiaopeng YUAN Ce ZHU Bo KE Yabing LI Honglang(School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China Insititue of Acoustics Chinese Academy of Sciences, Beijing 100190, China School of Electrical Engineering,YanShan University, Qinhuangdao 066004, China)

机构地区：[1]北京理工大学光电学院,北京100081 [2]中国科学院声学研究所,北京100190 [3]燕山大学电气工程学院,河北秦皇岛066004

出　　处：《压电与声光》2016年第5期744-746,共3页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(11174318;11304346);国家高技术研究发展("八六三"计划)计划基金资助项目(SS2013AA041103)

摘　　要：针对声表面波（SAW）应变传感器在测量应变过程中易受温度干扰的问题,提出了一种温度补偿法。在原有SAW应变片的基础上增加补偿片,用于补偿温度变化引起的附加应变值。实验结果表明,在-20-100℃范围内,未经补偿的应变传感器由温度引起的附加应变量最高为600με,补偿后附加应变量最高为43με,温度干扰得到抑制,验证了该温度补偿法的可行性。The surface acoustic wave（SAW）strain sensors were sensitive to the interferences from the temperature variation in the environment.A temperature compensated method was proposed to improve the sensitivity of the sensor.To compensate the additional strain caused by temperature,an acompensated gage was added.The result shows that in the range of-20-100℃,the additional strain caused by temperature was 600μεwithout compensation,while the highest additional strain was 43μεafter compensation,and the temperature interference was suppressed.The feasibility of the temperature compensate method was verified.

关 键 词：声表面波(SAW) 应变传感器 压电晶体 微扰理论 温度补偿 

分 类 号：TN65[电子电信—电路与系统]