基于四分之一波片的菲佐型同步移相干涉测量方法  

Method of Fizeau Simultaneous Phase-Shifting Interferometry Based on Quarter-Wave Plate

作　　者：蒋超[1] 郭仁慧[1] 张辉钦 周翔[1] 郑东晖[1] 陈磊[1] 

机构地区：[1]南京理工大学电子工程与光电技术学院,江苏南京210094

出　　处：《激光与光电子学进展》2016年第10期119-125,共7页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(61405092)

摘　　要：为了实现干涉测量平面的抗振,提出了一种同步移相干涉测量方案并搭建了实验装置。整个测量系统在菲佐移相干涉仪的基础上,利用四分之一波片作为参考镜,获得一对正交偏振光,经过棋盘相位光栅分光,利用光阑选取对于理想光栅衍射效率一致的(±1,±1)级衍射光作为测量分光路,使之先后通过相位延迟阵列和偏振片获得4幅移相量依次为π/2的干涉图。按照传统的4步移相算法,对被测波面进行了复原。分析了光强畸变和移相误差对系统测量误差的影响。与泰曼型同步移相干涉测量相比,该方案可以简化系统结构,减小系统误差,并且更易装校,更适合用于平面的测量。For the purpose of anti-vibration for interference measurement of flat surface, a method of simultaneous phase shifting interferometry is proposed in this paper, and the experimental device is set up. Based on Fizeau phase-shifting interferometer and using quarter-wave plate as reference mirror, the whole measurement system acquires a pair of orthogonal polarized light. By using beam splitting of the chessboard phase grating, diffracted beams of （±1,±1） orders are selected by the aperture for the same ideal grating diffracting efficiency as measured beams. The four diffracted beams pass through a phase delay array and a polarizing plate to obtain four interference patterns with phase-shifting of π/2 respectively. According to the traditional four step phase shifting algorithm, the measured wave front is restored. The influence of light intensity distortion and phase shift error on the system measuring error is analyzed. It can simplify the structure of the system, reduce the system error, make installation the easier and the measurement more suitable for the plane, by comparing to the Twyman simultaneous phase shifting interferometry.

关 键 词：测量 光学测量 菲佐干涉仪 同步移相 四分之一波片 光栅 

分 类 号：TH741[机械工程—光学工程]