纳秒激光脉冲对吸收玻璃烧蚀的烧蚀特性研究  

The characteristics of ablation pit on absorption glass surface by nano-second laser pulse

作　　者：李小魁[1] 陈朝阳[1] 张秋慧[1] 

机构地区：[1]河南工程学院电气信息工程学院,郑州451191

出　　处：《激光杂志》2016年第10期6-9,共4页Laser Journal

基　　金：国家自然科学基金青年基金(61403123);高等学校重点科研项目(15A510020)

摘　　要：吸收玻璃在激光衰减片等方面具有很多的用途,其对激光能量的强烈吸收起到很好的衰减作用,但是由于激光脉冲的集中沉积也很容易引起自身的损伤。采用纳秒激光脉冲对吸收玻璃进行聚焦烧蚀,观测其损伤特征并进行了热力学分析。研究表明:激光脉冲能量的集中沉积会使得辐照区域形成很深的坑点破坏,其熔化痕迹并不明显。理论分析表明,在激光烧蚀过程中起决定性作用主要可以分为热效应和力效应,其共同作用的效果决定了玻璃的相貌特征。而对于吸收玻璃,力效应明显比热效应明显,也就是激光辐照区域在升温达到熔化温度前,应力作用首先超过玻璃的拉伸应力而断裂,从而形成断裂坑。Absorption glass has many applications in optical field, such as neutral-density filter, its strong absorption of laser energy played a key role, on the other hand, the rapid deposition of energy can produce damage easily. Nanosecond laser pulses are used to study the damage characteristics of absorption glass and corresponding thermodynamic analysis has been carried. The research results show that the ablation point present crater shape pit without obvious melting tracks, which means that the pit is formed not from thermal effects but thermal stress effects. Theoretical analysis shows that the laser ablation process can be divided into thermal and thermal stress effects, and the ablation results are determined by the combined effects above. For absorption glass, the thermal stress can reach the fracture threshold before melting, so the ablation pit is formed by stress rupture mainly.

关 键 词：激光烧蚀 吸收玻璃 热力学效应 热应力 

分 类 号：TN23[电子电信—物理电子学]