动态原子力显微镜悬臂高阶谐振相位特性研究  

Research on phase characteristic of higher-order resonance cantilever in dynamic AFM

作　　者：黄强先[1] 张蕤[1] 张连生[1] 赵阳[1,2] 陈丽娟[1] 

机构地区：[1]合肥工业大学仪器科学与光电工程学院,合肥230009 [2]安徽建筑大学电子与信息工程学院,合肥230601

出　　处：《电子测量与仪器学报》2016年第9期1411-1417,共7页Journal of Electronic Measurement and Instrumentation

基　　金：合肥工业大学青年教师创新项目(JZ2015HGQC0212);安徽省高等学校省级自然科学基金(KJ2015JD09);国家自然科学基金(50975075)资助项目

摘　　要：硅悬臂具有多阶谐振的特性,基于这一特性,提出了在动态原子力显微镜(AFM)中,利用硅悬臂高阶谐振相位特性进行三维扫描的方法,并对悬臂高阶相位特性进行了理论分析与实验验证。从理论上分析了AFM悬臂高阶谐振相位特性较其一阶谐振的相位特性有更高的灵敏度和空间分辨力,在自制动态AFM的基础上加入相位反馈模块进行了实验,实验测得悬臂一阶、二阶谐振的灵敏度分别为9.0和17.5 V/μm;垂直方向空间分辨力分别为0.56和0.29 nm,实验结果与理论分析一致。通过悬臂二阶谐振相位扫描得到了光栅的表面形貌,证明了利用悬臂高阶谐振相位特性进行扫描的可行性。Based on the higher-order resonance characteristic of the silicon cantilever, a method which makes use the phase characteristic of the cantilever working at the higher-order resonance mode in AFM （atomic force microscope） is proposed. And the theoretical analysis and experimental verification on the phase characteristic of the higher-order resonance cantilever are carried out. It is proved in theory that the phase characteristic of the higher-order resonance cantilever has higher flexural sensitivity and vertical spatial resolution than the first-order. The experiment is carried out on the basis of the home built dynamic AFM adding the phase feedback module, the flexural sensitivity of the first and the second order resonance cantilever measured in the experiment is 9.0 and 17.5 V/μm, and the vertical spatial resolution is 0.56 and 0. 29 nm, respectively. The experimental results are in agreement with the theoretical analysis. The surface profile of a grating is obtained by the cantilever scanning at the second order resonance in phase-feedback, which proves that using the phase characteristics of the higher-order resonance cantilever to measure the surface topography is feasible.

关 键 词：动态AFM 高阶谐振 相位反馈 硅悬臂 

分 类 号：TH89[机械工程—仪器科学与技术] TN76[机械工程—精密仪器及机械]