一种用于台面探测器的新型电极结构（英文）  

A novel electrode design and implementation for mesa-arrayed infrared detectors

作　　者：黄玥[1] 陈奕宇[2] 马伟平[1] 刘丹[1] 陈昱[1] 叶振华[1] 丁瑞军[1] 何力[1] 

机构地区：[1]中国科学院上海技术物理研究所红外成像材料与器件重点实验室,上海200083 [2]中国科学院大学,北京100049

出　　处：《红外与毫米波学报》2016年第5期517-519,633,共4页Journal of Infrared and Millimeter Waves

基　　金：Supported by the national natural science foundation ot China(61404148,61534006)

摘　　要：提出一种用于台面探测器的新型电极结构.该结构通过在台面底部两次制备电极而获得接力电极.同传统的引出电极结构相比,这种接力电极结构不仅简化了从台面底部引出电极的工艺,而且能够增加台面顶部空间从而更有利于其它工艺的进行以及工艺集成.在200 W超声处理5分钟后,接力电极的高度和形貌都未发生变化.从倒焊互连的剖面SEM照片可以看出台面底部的接力电极是个整体,并且该接力电极结构完全可以应用在台面探测器中.A novel electrode structure for mesa-arrayed infrared detectors is proposed. A relayed electrode at the bottom of the trench is realized by depositing the electrode twice separately. Comparing with the traditional extended electrode,the novel electrode structure is not only beneficial to simplify the electrode introducing at the bottom of the trench out from the bottom to the top of the trench,but also capable of enlarging the top area on the mesa arrays for other processes and enhancing the structural integration correspondingly. The height and morphology of the relayed electrode were not changed after experiencing 200 W ultrasonic treatment for 5 mins. As shown in the cross-sectional SEM pictures of the flip-chip bonded devices,the relayed electrode at the bottom of the trench connected into a whole and reached the metallization pads on the other side. These results indicated that this newelectrode structure can be applied to the mesa-arrayed infrared detectors.

关 键 词：台面 电极 红外探测器 

分 类 号：TN303[电子电信—物理电子学] TN305