基于超薄钽酸锂晶体材料高响应太赫兹探测器（英文）  

High responsivity of terahertz detector based on ultra-thin LiTaO_3 crystal material

作　　者：梁志清[1] 刘子骥[1] 蒋亚东[1] 郑兴[1] 王涛[1] 于贺[1] 

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,四川成都610054

出　　处：《红外与毫米波学报》2016年第5期520-524,616,共6页Journal of Infrared and Millimeter Waves

基　　金：Supported by National Science Funds for Creative Research Groups of China(61421002);the National Natural Science Foundation of China(NSFC)(61405027);the China Postdoctoral Science Foundation(2014M562296);Fundamental Research Funds for the Central Universities(ZYGX2011X012)

摘　　要：太赫兹(Thz)探测器工作在室温条件下极大地促进了太赫兹科学与技术的应用。超薄(10μm)钽酸锂(LiTaO_3)晶片被用作太赫兹探测器敏感元材料。基于钽酸锂晶片太赫兹探测器在2.52 THz激光辐射源照射下,20Hz斩波频率时响应率可达到8.38×10~4V/W,等效噪声功率NEP)可达到1.26×10^(-10)W。这种加工超薄钽酸锂晶片的方法为制备高响应率太赫兹探测器提供了一个可行的方法。Terahertz（THz） detector work at room temperature could greatly expand the application of THz science and technology. Ultra-thin（ 10μm） lithium tantalate crystal（LiTaO3） material was used as sensitive layer of the detector. The responsivity could reach up to 8.38 × 10^4 V/W and the noise equivalent power（ NEP） could be as lowas 1. 26 × 10^（-10） W at 20 Hz operating frequency by laser radiation source at 2.52 THz. Furthermore,this processing method to fabricate the ultra-thin LiTaO3 crystal material could potentially provide a feasible approach for even higher response terahertz detectors.

关 键 词：太赫兹探测器 钽酸锂晶片 化学研磨及机械抛光 电压响应率 噪声等效功率 

分 类 号：O551[理学—热学与物质分子运动论] O782[理学—物理]