MEMS开关宽频程控步进衰减器设计与实现  

Design and implementation of MEMS switch broadband programmable step attenuator

作　　者：南雪莉[1] 张斌珍[1] 杨昕[1] 崔建利[1] 葛少雷 

机构地区：[1]中北大学电子测试技术重点实验室,山西太原030051

出　　处：《红外与激光工程》2016年第10期113-117,共5页Infrared and Laser Engineering

基　　金：国家自然科学基金(51475438);山西省研究生创新项目(2016BY124);山西省回国留学人员科研资助项目(2014-055);山西省中北大学基金项目(20161348)

摘　　要：提出了一种基于MEMS开关的射频衰减器设计方案。首先对整体电路的基础结构进行了设计,选择以CPW(共面波导)为传输线,接触式MEMS开关作控制器件,同时以开关中的电容作为断路时的平衡电容进行Q值匹配;其次,通过理论推导与计算得到了波导的截面尺寸;然后按所需衰减量计算T型网络各个电阻的阻值大小。再按照计算值在CST微波工作室中建模仿真,对比单级衰减和展频二级衰减的S参数,可以发现,在Q值匹配后的电路中,射频信号可以在更宽的频段内保持稳定衰减。最后通过UV-LIGA技术结合氧化钽电阻工艺对衰减器进行了样片试制与结果测试。结果表明,通过Q值匹配可以扩展衰减器的工作频段,为高频信号的稳定衰减提出了一种可行性方案。The design of the radio frequency attenuator was based on the MEMS switch. First of all, the basic structure of the electronic circuit was presented with CPW as the transmission line, the contact MEMS switch as the controller and the electric capacity in the switch as the balance criteria to match the Q value. Secondly, the size of cross section of waveguide was calculated abstractly. Thirdly, the resistance values in the T system were calculated according to the reduction. From the simulation on the CST microwave studio, the comparison of S values of first-order and second-order attenuator revealed that the radio frequency could keep a stable reduction in the wider band after the Q values were matched. Finally, the attenuator was sampled and tested. The result shows that the work frequency range of attenuator could be extended by Q value match which is a new feasibility for the stable attenuation of high frequency signal.

关 键 词：MEMS开关 射频衰减器 Q值匹配 

分 类 号：TN62[电子电信—电路与系统]