适用于FSM系统的菱形微位移放大机构设计  

Design of rhomboid micro stroke amplifier for FSM system

作　　者：方楚[1,2,3] 郭劲[1,2] 徐新行[1,3] 姜振华[1,2] 王挺峰[1,2] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]激光与物质相互作用国家重点实验室,吉林长春130033 [3]中国科学院大学,北京100049

出　　处：《红外与激光工程》2016年第10期162-168,共7页Infrared and Laser Engineering

基　　金：长春市科技计划项目(2013270)

摘　　要：为了增加压电陶瓷驱动快速反射镜的偏摆范围,对菱形微位移放大机构进行了研究设计。首先介绍了菱形结构的放大原理并利用变形能法分析了影响菱形结构性能的关键参数,然后建立了快速反射镜系统要求与菱形结构设计要求之间的联系,并根据自行设计的快速反射镜系统选择了菱形结构的关键参数,最后通过有限元仿真对菱形结构和快速反射镜系统进行了模态分析并对快速反射镜的偏摆范围进行了实验测试。仿真与实验结果表明,快速反射镜的偏摆范围大于6′,低阶谐振频率约为400 Hz,满足了快速反射镜的系统要求。文中研究得出,菱形结构的位移放大倍率与最大驱动力是此消彼长的两个性能,可以通过合理调整菱形长轴与菱形边夹角以及菱形边宽度使两个性能同时满足系统设计要求。Rhomboid micro stroke amplifier was designed in order to raise the tilting range of fast steering mirror driven by piezoelectric. Firstly, the theory of stroke amplifier was expounded and the key factors were analyzed with the help of energy method. Secondly, the connection between the performance requirement of fast steering mirror system and key factors of rhomboid mechanism was built. Then, key factors were resolved for self-designed fast steering mirror system. Finally, mode finite element analysis was made for both rhomboid mechanism and fast steering mirror and the experiment was carried out for testing the tilting range of fast steering mirror. The analysis and experiment shows that the tilting range is more than 6＇ and the frequency of first mode is about 400 Hz which satisfied the need of fast steering mirror system. The conclusion is that the multiple and the maximum driving force of rhomboid mechanism conflict with each other which can be coordinated by resolving the key factors of rhomboid micro stroke amplifier in order to meet the need of the whole system.

关 键 词：快速反射镜 压电陶瓷 位移放大机构 菱形结构 

分 类 号：TH741[机械工程—光学工程]