超洁净制造的研究与发展  

Research and Development of Ultra-clean Manufacturing

作　　者：白清顺[1] 郭永博[1] 陈家轩[1] 卢礼华[1] 张庆春[1] 张飞虎[1] 赵航[1] 袁晓东[2] 梁迎春[1] BAI Qingshun GUO Yongbo CHEN Jiaxuan LU Lihua ZHANG Qingchun ZHANG Feihu ZHAO Hang YUAN Xiaodong LIANG Yingchun(Mechanical and Electrical Engineering, Harbin Institute of Technology, Harbin 150001 Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900)

机构地区：[1]哈尔滨工业大学机电工程学院,哈尔滨150001 [2]中国工程物理研究院激光聚变研究中心,绵阳621900

出　　处：《机械工程学报》2016年第19期145-153,共9页Journal of Mechanical Engineering

基　　金：国家自然科学基金重点(51535003);中国工程物理研究院重大科技专项(2007)资助项目

摘　　要：制造学科是随着科学的演进和技术的进步不断地发展和变化的一个学科。结合激光聚变、电子制造、航空航天以及医疗器械等领域对洁净的需求,首次提出了超洁净制造的新概念,并对超洁净制造的内涵进行了界定。在上述相关领域中,表面污染物的演化和演变将对器件的性能和功能产生重要的影响。采用制造领域的新方法和新手段获得超洁净表面,并实现其工作时超洁净状态的维持是制约上述领域发展的瓶颈问题。在综合分析超洁净制造应用领域的基础上,提出超洁净制造基础理论和关键技术研究所面临的挑战,分析超洁净制造的技术内涵和研究内容,并针对相关领域中高洁净度的获得和保持技术进行了剖析。最后,提出超洁净制造未来发展的科学问题。旨在通过超洁净制造的研究为制造科学与工程提供新的发展思路,拓展并提升其应用的领域,服务于重大科学工程和重要技术领域的发展。Manufacturing discipline is a subject that develops and changes continuously with the evolution of science and the progress of technology. The concept of ultra-clean manufacturing（UCM） is initially proposed. The intension and extension of the ultra-clean manufacturing is defined according to the demand for cleanliness in the field of laser fusion, electronics manufacturing, aeronautics, astronautics and medical device, etc. In the related fields mentioned, the evolution of the surface contamination can bring an important impact on the performance and function of the devices. On the basis of comprehensive analysis of the application field in ultra-clean manufacturing, the challenges of fundamental theory and key technology for the ultra-clean manufacturing are proposed and the essence of the surface cleanliness is analyzed. In view of the present situation of the contamination adsorption and desorption on the surface of the parts, some cases of the ultra-clean manufacturing in the related field is dissected. Finally, the scientific issues and technical approach of the ultra-clean manufacturing is proposed considering its development in the future. The aim is to present a new development idea for manufacturing science and engineering, broad and elevate its areas of application. The development of major science project and key technology area can also benefit from the research of ultra-clean manufacturing.

关 键 词：超洁净制造 洁净度 污染物 制造学科 

分 类 号：TH16[机械工程—机械制造及自动化] TN305[电子电信—物理电子学]