多晶硅铸锭炉的三维热场分析  

Analysis of 3D Thermal Field in Multi-crystal Silicon Casting Furnace

作　　者：吴波[1] 刘传生 王伟杨 金浩 肖贵云 

机构地区：[1]上饶师范学院江西省塑料制备成型重点实验室,江西上饶334001 [2]理想能源设备(上海)有限公司,上海201203 [3]晶科能源有限公司,江西上饶334199

出　　处：《铸造技术》2016年第10期2238-2242,2253,共6页Foundry Technology

基　　金：国家自然科学基金资助项目(11404214);江西省教育厅科技落地计划项目(KJLD12046)

摘　　要：以GT Solar公司DSS^(TM)450型多晶硅铸锭炉为例,建立了铸锭炉热场的三维热学模型,由此计算并获得了炉内的三维热场分布,发现热场呈三维分布,而不是简单的二维轴对称分布;比较了4种不同功率分配方案的热场分布,发现提高顶部加热器的功率配比对温度不均匀性有一定的改善,但却会使加热效率大大下降;对冷却板内的温度分布也进行了数值模拟,发现支撑柱对热场有重要影响。Taking GT Solar Corporation＇s DSS^（TM）450 type multi-crystal silicon casting furnace as an example,a three dimension thermal model for the casting furnace was established to calculate and obtain the distribution of thermal field in the furnace.The results show that the distribution of thermal field is three dimensional rather than simple two-dimensional axisymmetric.The comparison of the distribution among four different heating power proportioning solutions indicates that higher power in the top heater can slightly improve the non-uniformity of the thermal filed but greatly reduce the efficiency of heating.And the columns in cooling plate has the significant influence on the thermal field.

关 键 词：多晶硅铸锭 三维热场 热学模型 数值模拟 

分 类 号：TN304.12[电子电信—物理电子学]