微陀螺仪检测平衡回路建立与验证  

Construction on Detection Balance Loop of Micro-gyroscope

作　　者：王晓雷[1,2] 赵向阳[3] 曹玲芝[1] 张吉涛[1] 刘玉翠[1] 郑晓婉[1] 

机构地区：[1]郑州轻工业学院电气信息工程学院,郑州450002 [2]东南大学仪器科学与工程学院,南京210096 [3]河南机电高等专科学校,河南新乡453003

出　　处：《火力与指挥控制》2016年第10期146-149,共4页Fire Control & Command Control

基　　金：国家自然科学基金(61503344);博士科研基金资助项目(2014BSJJ046)

摘　　要：基于梳齿电容微结构,分析了电压驱动梳齿电容振动产生静电力的工作原理;针对微陀螺仪开环直接检测的不足,采用静电力平衡哥氏力的方法构建平衡回路,抑制哥氏振动。提取了微陀螺仪哥氏输出信号振动幅值;以哥氏振动幅值为控制量,设计了微陀螺仪检测平衡回路。仿真和实验表明构建的检测平衡回路能够有效地平衡哥氏力,抑制哥氏振动,使质量块回到平衡位置,微陀螺仪标度因数线性度和对称性有显著提高,测量范围、阈值和分辨率等性能均有不同程度改善。Based on comb capacitance detection micro-structure,the principle of voltage drive comb capacitance vibration to generate electrostatic force is analyzed. Aiming at the deficiency of open-loop direct detection of micro-gyroscope,a method using electrostatic force to balance Coriolis force is adopted,so that the Coriolis vibration is suppressed. The Coriolis signal vibration amplitude of micro-gyroscope is extracted;with vibration amplitude as the control variable,the detection balance loop of micro-gyroscope is constructed. The simulation and experiments show that the constructed detection balance loop is able to balance effectively the Coriolis force,suppress the Coriolis vibration,and make the mass return to the balance position. The scale factor linearity and symmetry have been enhanced significantly,and the measurement range,threshold,resolution and other performances have been improved at some extent.

关 键 词：微陀螺仪 检测平衡回路 哥氏效应 闭环控制 

分 类 号：V241.6[航空宇航科学与技术—飞行器设计]