电流体动力学喷印电压控制模式及其应用现状  

Voltage Control Modes of the Electrohydrodynamic Jet Printing and Its Application Status

作　　者：张礼兵[1] 左春柽[1] 黄风立[1] 吴婷[1] 

机构地区：[1]嘉兴学院机电工程学院,浙江嘉兴314001

出　　处：《微纳电子技术》2016年第11期743-750,762,共9页Micronanoelectronic Technology

基　　金：浙江省自然科学基金重点项目(LZ14E050002);浙江省公益性技术应用研究计划项目(2015C31069);浙江省教育厅一般科研项目(Y201534088)

摘　　要：电流体动力学喷印技术是一种制备微纳米结构与器件的新型技术,该技术在多种功能器件的制备方面受到广泛关注。阐述了电流体动力学喷印技术的研究背景,通过分析得出电压控制问题是电流体动力学喷印技术中的一个重要问题。概述了目前电流体动力学喷印技术的电压控制模式,主要包括直流高压、高压脉冲、直流电压叠加脉冲电压、交流电压和直流电压叠加交流电压五种控制模式,并对各种电压控制模式及其应用现状进行分析。最后,对电流体动力学喷印的电压控制模式中存在的问题以及未来发展的前景进行了总结和展望。An electrohydrodynamic jet printing technology is a new preparation technology for the micro/nano structures and devices,which has been received extensive attention in the preparation of various functional devices.Firstly,the research background of the electrohydrodynamic jet printing technology is described,and through the analysis,it is concluded that the voltage control problem is an important problem in the electrohydrodynamic jet printing.Secondly,the main voltage control modes of the electrohydrodynamic jet printing are summarized,which mainly include five kinds of the control modes,such as the DC high voltage,high pulse voltage,pulse voltage superimposed on a background DC voltage,AC voltage and AC voltage superimposed on a background DC voltage.And each voltage control mode and its applications are analyzed.Finally,the existing problems and future prospects of the voltage control mode are summarized and prospected.

关 键 词：电流体动力学 喷印技术 电压控制模式 微/纳图案化 微纳米制造 

分 类 号：O35[理学—流体力学]