谐振式MEMS磁传感器接口电路设计  

Design of resonant MEMS magnetic sensor interface circuit

作　　者：高华磊[1] 徐德辉[1] 刘松[1] 马颖蕾[1] 熊斌[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所,上海200050

出　　处：《传感器与微系统》2016年第11期87-89,93,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(51577186;51306200)

摘　　要：介绍了一种谐振式微系统(MEMS)磁传感器的接口电路,电路由驱动电路和信号检测处理电路组成。驱动电路采用直接数字频率合成器(DDS)产生磁传感器驱动信号,同时为检测电路提供同步信号;信号检测处理电路对磁传感器输出信号和DDS产生的同步信号进行同步解调,最终得到所需的磁场信号。最后对电路的性能和测试结果进行分析和总结。An interface circuit for resonant MEMS magnetic sensor is introduced,the circuit is composed of driving circuit and signal detection and processing circuit. Driving circuit uses direct digital frequency synthesizer（ DDS） to generate magnetic sensor driving signal. At the same time,it provides synchronizing signal for detection circuit. Signal detection and processing circuit demodulates output signal of magnetic sensor and synchronizing signal generated by DDS. Finally,magnetic field signal needed is obtained. Characteristics of circuit and results of test are analyzed.

关 键 词：微系统磁传感器 直接数字频率合成器驱动 同步解调 接口电路 

分 类 号：TN709[电子电信—电路与系统]