精密测角仪的误差溯源及其补偿方法研究  

Research on Error Tracing and Compensation Method of Precision Goniometer

作　　者：马娜娜[1] 付西红[1] 段战军[1] 周美英[1] 李硕[1] 

机构地区：[1]中国科学院西安光学精密机械研究所,陕西西安710119

出　　处：《测试技术学报》2016年第5期457-460,共4页Journal of Test and Measurement Technology

摘　　要：为了简化精密测角仪的误差分析及数据处理过程,根据精密测角仪的结构组成及测量原理,对精密测角仪的误差进行溯源,并分析了各种误差源对测量精度的影响;根据精密测角仪的角度测量机理提出了一种基于被测面自准直像位置的误差补偿方法;采用精密测角仪进行被测面自准直像在不同位置时的角度测量实验,根据测量实验数据给出了误差补偿线性方程.实验结果表明:应用此误差补偿方法可有效缩减前期测量准备调整过程,使精密测角仪的应用更加便捷,简化了精密测角仪的误差分析及数据处理过程,为实现全自动精密测量提供基础.For simplifying error analysis and data-processing of precision goniometer,first of all,according to the structure and measuring principle of precision goniometer,first of all,error source are traced and analyzed the influence of each error source on the measurement accuracy.Secondly,An error compensation method based on the self-collimation image position of the measured surface is proposed according to the angle measurement mechanism of precision goniometer.Finally,The precision goniometer was used to measure the angle of the measured surface from self-collimation image from different position,the error compensation linear equation is given by fitting the experiment data.Experimental results indicate that the precision can be improved by using the error compensation method,and the method which can effectively reduce the prophase measurement preparation adjustment process,the error analysis and data processing of precision goniometer is simplified and more convenient,and provides the basis for realizing full automatic precision measurement.

关 键 词：精密测角仪 测量精度 误差溯源 补偿方程 

分 类 号：O435[机械工程—光学工程]