Low-cost method of fabricating large-aperture,high efficiency,Fresnel diffractive membrane optic using a modified moir technique  

作　　者：张健 栗孟娟 阴刚华 焦建超 刘正坤 徐向东 付绍军 

机构地区：[1]National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China [2]Beijing Institute of Space Mechanics & Electricity, Beijing 100076, China

出　　处：《Chinese Optics Letters》2016年第10期10-14,共5页中国光学快报（英文版）

基　　金：supported by the National Natural Science Foundation of China under Grant No.11375175

摘　　要：To reduce the cost and achieve high diffraction efficiency, a modified moir@ technique for fabricating a large- aperture multi-level Fresnel membrane optic by a novel design of alignment marks is proposed. The modified moire fringes vary more sensitively with the actual misalignment. Hence, the alignment accuracy is significantly improved. Using the proposed method, a 20 μm thick, four-level Fresnel diffractive polyimide membrane optic with a 200 mm diameter is made, which exhibits over 62% diffraction efficiency into the ＋1 order, and an efficiency root mean square of 0.051.To reduce the cost and achieve high diffraction efficiency, a modified moir@ technique for fabricating a large- aperture multi-level Fresnel membrane optic by a novel design of alignment marks is proposed. The modified moire fringes vary more sensitively with the actual misalignment. Hence, the alignment accuracy is significantly improved. Using the proposed method, a 20 μm thick, four-level Fresnel diffractive polyimide membrane optic with a 200 mm diameter is made, which exhibits over 62% diffraction efficiency into the ＋1 order, and an efficiency root mean square of 0.051.

关 键 词：technique Low-cost method of fabricating large-aperture high efficiency Fresnel diffractive membrane optic using a modified moir high 

分 类 号：TH74[机械工程—光学工程]