不同Mo含量对CrMoN薄膜耐腐蚀性能的影响  

Influence of Different Mo Contents on Corrosion Resistance of CrMoN Coatings

作　　者：宋沂泽 高原[1,2] 王成磊[1] 彭凯[1] 

机构地区：[1]桂林电子科技大学材料学院,广西桂林541004 [2]广西信息材料重点实验室,广西桂林541004

出　　处：《表面技术》2016年第10期148-153,共6页Surface Technology

基　　金：国家自然科学基金资助项目(51264007);国家自然科学基金青年基金(51201043);广西信息材料重点实验室项目(1210908-214-Z);广西自然科学基金资助项目(2015GXNSFBA139214);桂林电子科技大学研究生教育创新计划资助项目(YJCXB201501);广西科学研究与技术开发科技攻关计划项目(桂科攻12118020-2-2-1)~~

摘　　要：目的研究Mo含量对CrN薄膜硬度、结合力和耐腐蚀性能的影响。方法用多弧离子镀技术,在4Cr13钢表面沉积CrN,并掺杂不同量的Mo原子。通过显微硬度计、附着力划痕仪、电化学测量仪和能谱仪分别检测薄膜的硬度、结合力、电化学腐蚀性能和薄膜的元素含量。结果当Mo的原子数分数为0.15%、4.23%、5.15%、7.09%、14.26%、21.12%、31.08%时,硬度值分别为2141.1HV、2416.0HV、2416.0HV、2962.3HV、2580.4HV、2710.5HV、2441.8HV,结合力分别为45、47、52、57、38、37、34N;在3.5%NaCl溶液中,它们的相对腐蚀速率分别是Mo(5.15%)的6.53、4.12、1、2.22、8.72、.2.42、2.44倍;在1mol/LNaOH溶液中,它们的相对腐蚀速率分别是Mo(14.26%)的6.74、5.29、1.49、2.82、2.57、1、7.25倍;在1mol/LH2SO4溶液中,它们的相对腐蚀速率分别是Mo(14.26%)的9.20、4.10、10.31、9.25、1、3.29、7.46倍。结论当Mo的原子数分数为7.09%时,结合力最大为57N,显微硬度达到最大值,为2962.3HV;当Mo的原子数分数为14.26%时,在H_2SO_4溶液和NaOH溶液中的耐蚀性能最好;当Mo的原子数分数为5.15%时,在NaCl溶液中的耐蚀性能最好。复合薄膜腐蚀机理主要是局部腐蚀中的小孔腐蚀,另外也会发生缝隙腐蚀和电偶腐蚀。The work aims to study influence of different Mo contents on hardness, binding force and corrosion resistance of Cr N films. Cr Mo N films were deposited with different amounts of Mo atom on the surface of 4Cr13 stainless steel by multi-arc ion plating（MAIP）. The hardness, binding force, electrochemical corrosion resistance and element content of Cr Mo N films were respectively investigated by microhardness tester, adhesion scratch tester, electrochemical measuring instrument and energy disperse spectroscopy. The results showed that when the Mo atomicity fractions of Cr Mo N achieved 0.15%, 4.23%, 5.15%, 7.09%, 14.26%, 21.12% and 31.08%, the hardness values were respectively 2141.1HV, 2416.0HV, 2416.0HV, 2962.3HV, 2580.4HV, 2710.5HV and 2441.8HV while the binding forces were respectively 45, 47, 52, 57, 38, 37, 34 N. In 3.5% NaCl solution, the relative corrosion rate was respectively 6.53, 4.12, 1, 2.22, 8.72, 2.42 and 2.44 times of that Mo（5.15%）. In 1 mol/L NaOH solution, the relative corrosion rate was respectively 6.74, 5.29, 1.49, 2.82, 2.57, 1, 7.25 times of that of Mo（14.26%）. In 1 mol/L H_2SO_4 solution, the relative corrosion rate was respectively 9.20, 4.10, 10.31, 9.25, 1, 3.29 and 7.46 times of that of Mo（14.26%）. The binding force can be up to 57 N and microhardness reaches the maximum—2962.3HV when the Mo atomicity fraction reaches 7.09%. Corrosion resistance is best in H_2SO_4 solution and NaOH solution when the Mo atomicity fraction reaches 14.26%. Corrosion resistance is best in NaCl solution when the Mo atomicity fraction reaches 5.15%. Corrosion mechanism of composite films is mainly pitting corrosion, and crevice and galvanic corrosion are present as well.

关 键 词：多弧离子镀 CrMoN复合薄膜 硬度 结合力 耐腐蚀性能 腐蚀机理 

分 类 号：TG174[金属学及工艺—金属表面处理]