基于椭圆偏振光谱法的玻璃表面离子束改性分析  

Analysis of Glass Surface Modification with Ion Beam Based on Ellipsometry

作　　者：孙瑶[1] 汪洪[1] 

机构地区：[1]中国建筑材料科学研究总院,国家玻璃深加工工程技术中心,绿色建筑材料国家重点实验室,太阳能与建筑节能玻璃材料加工技术北京市重点实验室,北京100024

出　　处：《光谱学与光谱分析》2016年第10期3388-3393,共6页Spectroscopy and Spectral Analysis

基　　金：国家自然科学基金项目(51272245);国家“十二五”科技支撑计划项目(2013BAE12B01)资助

摘　　要：采用阳极层线性离子源解离氮气对玻璃表面进行刻蚀处理,研究表面改性后玻璃表面的变化,并分析离化电压对表面粗糙度、折射率以及光学厚度的影响。在此基础上,基于椭圆偏振光谱仪,通过对比不同表面状态下的Δ光谱,讨论固定波长变化入射角的Δ光谱曲线特征与表面折射率、布儒斯特角、粗糙度以及光学厚度之间的关系。结果表明,刻蚀后玻璃的布儒斯特角附近的Δ光谱曲线形状发生变化,突变向高角度偏移,曲线下降斜率增大。通过建模并拟合分析发现,氮离子束轰击使玻璃表面产生光密介质层,表面折射率增大,布儒斯特角增大,粗糙度降低,且随离化电压升高,折射率不变,而光密介质层厚度增加。由原子力显微镜分析表面形貌,验证了离子束对玻璃表面的平整化作用。X射线光电子能谱结果表明离子束使玻璃表面发生选择性溅射,推断光密介质层的产生来自于离子束对玻璃表面的夯实作用。此外,推导并验证了Δ光谱曲线的特征与材料表面状态之间的普适关系,提出了基于椭圆偏振光谱仪的材料表面评估方法,即Δ曲线的突变发生角度增大说明折射率与布儒斯特角的增大;下降斜率增大说明表面粗糙度减小;曲线两端尖角增大说明光学厚度增大。反之亦然。Etching treatment was performed on glass surface by dissociated nitrogen using anode layer linear ion source.The changes of glass surface after surface modification was analyzed and the effect of ionization voltage on surface roughness,refractive index and optical thickness was investigated.Accordingly,the relationship betweenΔspectral characteristics of fixed wavelength changed angle of incidence and refractive index,Brewster angle,surface roughness and optical thickness was discussed through the comparison ofΔspectrum under different surface conditions based on spectroscopic ellipsometry.The results showthat the shape ofΔspectrum near Brewster angle changes,the abrupt change ofΔspectrum shifts to larger angle,and the slope ofΔspectrum increase at the same time.Modeling and fitting analysis reveals that an optically denser layer was produced,the refraction index and Brewster angle increase and surface roughness decrease of glass caused by nitrogen ion beam etching treatment.However,the refraction remains consistence,and the depth of denser layer increase with increasing ionization voltage.The surface morphology analysis by AFM verified the leveling effect of glass surface by nitrogen ion beam.XPS measurement indicates the optional sputtering of glass surface by nitrogen ion beam,inferring the generation of denser layer arises from the compaction of ion beam.Furthermore,the general relationship between the characteristic ofΔspectrum and surface conditions of materials was theoretical derived and verified,and an evaluation of material surface variations was proposed.Such as the increase of abrupt change angle illustrates the increase of refractive index and Brewster angle,the increase of slope demonstrates the decrease of surface roughness,the increase of sharp corner of both sides evident the increase of optical thickness,vice-versa.

关 键 词：椭圆偏振光谱仪 玻璃 线性离子源 布儒斯特角 粗糙度 

分 类 号：TN305.8[电子电信—物理电子学]