激光直写机床系统正交性误差影响下计算全息图相位分析  

Phase Analysis in Computer-Generated Hologram Induced by Direct Laser Writing Systems with Orthogonality Error

作　　者：郑立功[1] 郝腾[1,2] 国成立 王若秋[1,2] 张志宇[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所光学系统先进制造技术重点实验室,吉林长春130033 [2]中国科学院大学,北京100049

出　　处：《光学学报》2016年第10期147-154,共8页Acta Optica Sinica

基　　金：国家自然科学基金(51305422);国家973计划(2011CB013200)

摘　　要：计算全息图(CGH)在非球面、自由曲面等光学元件的高精度检测中发挥着重要作用。激光直写机床导轨的正交性误差会影响CGH图案的绘制精度,进而在面形检测结果中引入像散误差。为定量研究激光直写机床导轨正交误差对CGH检测结果的影响,利用标量衍射理论,建立激光直写机床导轨角度误差模型,以CGH对准区域图案为例对机床导轨正交性误差的影响进行分析。实验结果表明在机床导轨正交性误差为800μrad时的均方根(RMS)值、峰谷值(PV)值和Zernike像散系数与理论值分别相差2.26%、2.33%、1.72%,从而验证所建立误差模型的正确性。Computer-generated hologram （CGH） plays an important role in testing high-accuracy optical elements such as aspheric and freeform surfaces. However, the orthogonality error induced by the rails of direct laser writing systems will deteriorate the fabrication accuracy of CGH, and thus introduce astigmatism error to the testing results of surface shape. To quantitatively study the influence of orthogonality error induced by the rails of direct laser writing systems on testing results of CGH, a model of rails＂ angle error of direct laser writing systems using scalar diffraction theory is established, and the impact of orthogonality error on the alignment section of the CGH is analyzed. The experimental results indicate that there is 2.26 %, 2.33 % and 1.72 % deviation in root mean square （RMS）, peak valley（PV） and Zernike astigmatic coefficient respectively with theoretical results when orthogonality error is 800 μrad, which verifies the correctness of the established error model.

关 键 词：测量 计算全息图 激光直写 标量衍射理论 对准区域 正交性误差 

分 类 号：O439[机械工程—光学工程] O436.1[理学—光学]