四极质谱仪在电子诱导脱附实验中的应用  

Application of quadrupole mass spectrometer in electron-stimulated desorption

作　　者：黄化岩[1] 陈明[1] 李灿伦 HUANG Hua-yan CHEN Ming LI Can-lun(Shanghai Institute of Applied Physics, Chinese Academy of Science, Shanghai 201204, China Shanghai Institute of Spacecraft Equipment, Shanghai 200240, China)

机构地区：[1]中国科学院上海应用物理研究所,上海201204 [2]上海卫星装备研究所,上海200240

出　　处：《真空》2016年第5期51-54,共4页Vacuum

摘　　要：光电解吸气载是同步辐射光束线特有的解吸气载。经研究,光电解吸气载是光束线真空系统动态情况下的主要气载。在整个光电解吸过程中,光电子及二次电子对真空材料表面吸附气体的激发起主要作用。电子诱导脱附实验(ESD)是研究光电解吸过程的重要手段。本课题针对不同材料的样品及不同样品处理工艺情况下,使用MPH 200M四极质谱仪测量样品室中残余气体分压,得到了真空室材料受电子激发后的残余气体成分,并利用上述气体分压计算出主要残气气体成分的电子激发解吸系数同入射电子累积剂量的关系。为光束线真空系统维护提供了实验数据。Photon-stimulated-desorption is unique to the synchrotron radiation beam line, which is the main part of the dynamic gas load of the beam line vacuum system. In the process of the whole Photon-stimulated-desorption, the photoelectron and secondary electron excitation play a main role on the excitation of vacuum material surface adsorption gas. By using the electron-stimulating desorption（ESD）, some experiments with different materials and processes can be done. By using MPH200 M RGA, we got the partial pressures of residual gases. We have thus obtained the ESD gas yield as a function of the integrated electron dose.Our work provides experimental data for maintenance of the beamline vacuum system.

关 键 词：同步辐射 光电解吸 电子诱导脱附 四极质谱仪 

分 类 号：TB773[一般工业技术—真空技术]