一种基于磁扭转的微镜电流传感器力学特性分析  

Study on Mechanical Properties of Micro-mirror Current Sensor Based on Magnetic Torsion

作　　者：黄梅红[1] 王巨锋[2] 

机构地区：[1]泉州师范学院应用科技学院,福建泉州362000 [2]华侨大学信息科学与工程学院,福建厦门361021

出　　处：《半导体光电》2016年第5期660-665,共6页Semiconductor Optoelectronics

基　　金：福建省教育厅项目(JA15396);福建省光传输与变换重点实验室开放项目(2014101)

摘　　要：提出一种通过扭转引起光强变化来检测电流的磁敏传感器结构,包括扭转微镜结构和光检测部分。分析了传感器的磁敏原理和力学理论,根据结构设计综合考虑给出了传感核心部件的结构参数,通过仿真获得不同电流下扭转力矩与扭转角度、各结构参数的关系曲线,最后通过实验验证了分析的干扰信号的合理性,所要测量的交变电流信号跟测得的光强信号成正比,表明该电流传感器具有一定的实际应用价值。A kind of magnetic sensor structure for detecting current by analyzing the change of light intensity caused by torsion was studied in this paper, which includes torsion micro-mirror structure and the part of optical detection. The magnetic principle and mechanics theory of sensor are introduced. The structure parameters of the sensing core parts are presented according to structure design. The curves of torsional moment and torsional angle and that of the structure parameters were recorded at different alternating currents by the simulation. Finally, the rationality of analysis of the interference signal was testified, the alternating current to be measured is proportional to the measured light intensity signal. The results show that this current sensor has a certain value in actual applications.

关 键 词：扭转微镜 电流传感器 磁敏元件 力学分析 

分 类 号：TN29[电子电信—物理电子学]