双层氮化硅减反、钝化结构对多晶硅太阳电池性能的影响  

Effect of Double-layer Sinx Antireflection/Passivation Coating on Performance of Multi-crystalline Silicon Solar Cells

作　　者：吕文辉[1] 何一峰 龚熠 陆波 

机构地区：[1]湖州师范学院应用物理系,浙江湖州313000 [2]浙江省贝盛光伏股份有限公司,浙江湖州313008

出　　处：《半导体光电》2016年第5期707-711,共5页Semiconductor Optoelectronics

基　　金：国家自然科学基金项目(61204068);浙江省重大科技专项重点工业项目(2013C01078);浙江省自然科学基金项目(LY15F040002);中国科学院光电材料化学与物理重点实验室开放课题(2008DP173016)

摘　　要：探究了多晶硅太阳电池表面双层氮化硅减反、钝化结构的产线工艺。示范性实验结果表明,直接与多晶硅接触的底层氮化硅的厚度是双层氮化硅减反、钝化能力的一个关键因素。相对于单层氮化硅减反、钝化的多晶硅太阳电池,厚度优化的双层氮化硅减反、钝化电池片的短路电流和开路电压均有所改善,相应的光电转换效率提升超过0.2%。光电转换效率的提升归因于双层氮化硅减反、钝化结构有利于降低光损失和表面钝化。Double-layer SiNx antireflection/passivation coating on multi-crystalline silicon solar cells for industrial production line application was explored. The results show that the thickness of the bottom SiNx layer play an important role for the ability of antireflection and passivation. By using the double-layer SiNx coating with a reasonable thickness parameter, the multi-crystalline silicon solar cells show a simultaneous enhancement in short circuit current and open circuit voltage, resulting in an increased amount of higher than 0.2% for power conversion efficiency as compared to single-layer SiNx coated cells. Improved cause of the power conversion efficiency may be attributed to enhanced surface passivation and reduced light loss by the doublelayer SiNs antireflection/passivation coating.

关 键 词：多晶硅太阳电池 双层氮化硅 减反射 钝化 

分 类 号：TN40[电子电信—微电子学与固体电子学]