背抛光高效PERL硅太阳电池的研究  

STUDY OF REAR SURFACE TREATMENT FOR PERL SILICON SOLAR CELL

作　　者：李文佳[1,2] 王晓[2,3] 朱益清[2,3] 钱维莹[2,3] 施正荣 李果华[2,3,4] 

机构地区：[1]江南大学物联网学院,无锡214122 [2]江南大学理学院,无锡214122 [3]江苏省轻工光电工程技术研究中心,无锡214122 [4]江苏省(尚德)光伏技术研究院,无锡214028

出　　处：《太阳能学报》2016年第10期2460-2466,共7页Acta Energiae Solaris Sinica

基　　金：教育部;国家外国专家局"111"工程(高等学校学科创新引智计划)(B13025);江苏省政策引导类计划(产学研合作)(BY2015019-04)

摘　　要：研究两种背面平坦化方法(碱抛光和酸抛光)对PERL太阳电池的影响。通过分析激光扫描显微镜(LSM)、扫描电子显微镜(SEM)、少子寿命及电池的电性能参数、反射率和内量子效率(IQE),对比碱抛光条件下不同厚度的SiN_x背钝化膜对电池的影响,并确定合适的SiN_x厚度为180 nm。继而研究酸抛光的减薄量对电池的影响。综合分析少子寿命、LSM图像及电池的反射率、IQE和电性能参数,得到最优减薄量为0.24 g。此条件下制备出的单晶PERL电池效率为20.31%。The effect of two kinds of rear treatment methods （alkaline polishing and acid etching） on PERL solar cell was investigated. The suitable thickness （ 180 nm） of rear passivation SiNx film for alkaline polished cell was selected by analyzing LSM images, SEM images, minority carrier lifetime, cells＇ electrical properties, reflectivity and IQE, and comparing the effect of different thickness of rear passivation SiNx film on cell under alkaline polishing. Then the effect of acid etching on PERL cells was studied. The cells＇ minority carrier lifetime, LSM image, reflectivity, IQE and electrical properties were analyzed synthetically discussed. PERL ceils＇ efficiency of 20.31% for acid etching was achieved when the etched weight was 0.24 g.

关 键 词：太阳电池 PERL 背表面平坦化 碱抛光 酸抛光 

分 类 号：TK514[动力工程及工程热物理—热能工程]