Design and testing of micro-tribometer with macro applied load  

作　　者：XU HongYi ZHANG ChenHui WU Pu 

机构地区：[1]State Key Laboratory of Tribology, Tsinghua University [2]Shenzhen Key Laboratory of Micro-nano Manufacturing, Research Institute of Tsinghua University in Shenzhen

出　　处：《Science China(Technological Sciences)》2016年第11期1666-1672,共7页中国科学（技术科学英文版）

基　　金：supported by National Natural Scienceof China(Grant Nos.51527901,51335005&51321092);National Basic Research Program of China(Grant No.2013CB934200)

摘　　要：With the development of superlubricity, the requirement for the accuracy of measuring super low friction force becomes more and more high. In this study, a novel micro-tribometer has been designed. The resolution and accuracy of friction force are 0.01 m N by using the dual frequency laser interferometer. Experiments were performed to investigate the ability of measuring friction force from different aspects. The interference signal mixed in the measured friction force curve was analyzed and can be removed by a designed filter. The results of experiment show that the tribometer is capable of measuring a super low friction force in the order of magnitude of 0.01 m N with an applied load up to 1 N.

关 键 词：friction test methods dual-frequency laser interferometer bender piezo actuator 

分 类 号：TH87[机械工程—仪器科学与技术]