PZT陶瓷的激光加工研究  

Research of Laser Processing on Piezoelectric Ceramic

作　　者：杨松涛[1] 张文斌[1] 裴章琴 程秀全[1] 赵立华[1] YANG Songtao ZHANG Wenbin PE CHENG Xiuquan ZHAO Lihua(The 45th Research Institute of CETC, Beijing 100176, China)

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《电子工业专用设备》2016年第10期33-37,共5页Equipment for Electronic Products Manufacturing

摘　　要：介绍了压电陶瓷的分类特性和加工方式,以及激光在压电陶瓷加工中的原理和应用,通过分析计算解决了激光加工过程中的精度误差问题,提高了加工精度和效率,取得了良好的加工效果;研究结果可以应用于相关激光加工设备的升级和改进。Characteristics and processing method of piezoelectric ceramic were introduced in the paper. The principle and use of laser will be discussed in the piezoelectric ceramic＇s processing, by analyzing and calculating, the problems of precision have been solved. The precision and efficiency of process were enhanced completely in order to get well effect. This function has changed the single machining mode and expanded the application of laser machining equipment.

关 键 词：压电陶瓷 激光加工 精度 

分 类 号：TN29[电子电信—物理电子学]